Bulk acoustic wave resonator
AssigneeAvago Technologies General IP (Singapore) Pte. Ltd.
InventorsBrice Ivira, John D. Larson, III, Robert Thalhammer, Klaus-Guenter Oppermann
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Abstract
A bulk acoustic wave (BAW) resonator includes: an acoustic reflector disposed in a substrate; a lower electrode disposed over the acoustic reflector; a piezoelectric layer disposed over the lower electrode; and an upper electrode disposed over the piezoelectric layer. A contacting overlap of the lower electrode, the piezoelectric layer and the upper electrode over the acoustic reflector comprising an active area of the BAW resonator. An opening exists in the upper electrode in a region of the BAW resonator susceptible to unacceptable overheating.
Claims25
A bulk acoustic wave (BAW) resonator, comprising:
- an acoustic reflector disposed in a substrate;
- a lower electrode disposed over the acoustic reflector;
- a piezoelectric layer disposed over the lower electrode;
- and
- an upper electrode disposed over the piezoelectric layer, a contacting overlap of the lower electrode, the piezoelectric layer, and the upper electrode over the acoustic reflector comprising an active area of the BAW resonator, wherein an opening exists in the upper electrode in a region of the BAW resonator susceptible to unacceptable overheating.
An electrical filter, comprising:
- a series bulk acoustic wave (BAW) resonator connected to a shunt BAW resonator, the series BAW resonator comprising:
- an acoustic reflector disposed in a substrate;
- a lower electrode disposed over the acoustic reflector;
- a piezoelectric layer disposed over the lower electrode;
- and
- an upper electrode disposed over the piezoelectric layer, a contacting overlap of the lower electrode, the piezoelectric layer, and the upper electrode over the acoustic reflector comprising an active area of the series BAW resonator, wherein an opening exists in the upper electrode in a region of the series BAW resonator susceptible to unacceptable overheating.
Dependencies are inferred from the claim text.