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US 2018/0123554 A1Published application
Bulk acoustic wave resonator and method for manufacturing the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsJe Hong KYOUNG, Jin Suk SON, Hwa Sun LEE, Sang Hyun YI
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Abstract
A bulk acoustic wave resonator includes a substrate protective layer disposed on a top surface of a substrate, a cavity defined by a membrane layer and the substrate, and a resonating part disposed on the membrane layer. The membrane layer includes a first layer and a second layer, the second layer having the same material as the first layer and having a density greater than that of the first layer.
Claims17
A bulk acoustic wave resonator, comprising:
- a substrate protective layer disposed on a top surface of a substrate;
- a cavity defined by a membrane layer and the substrate;
- and
- a resonating part disposed on the membrane layer,
- wherein the membrane layer comprises a first layer and a second layer, the second layer comprising the same material as the first layer and having a density greater than that of the first layer.
2 more elements
A method for manufacturing a bulk acoustic wave resonator, the method comprising:
- disposing a sacrificial layer on a substrate;
- covering the sacrificial layer with a membrane layer;
- soft etching the membrane layer to form a first layer and a second layer;
- and
- disposing a resonating part on the membrane layer.
2 more elements
Dependencies are inferred from the claim text.