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US 2018/0123486 A1Published application
Electrostatic chuck and electrostatic adsorption apparatus
AssigneeSamsung Display Co., Ltd.
InventorsMin Ho BAE, Byung-Moo KIM, Yun Soo KIM, Tae-Ho YOUN
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Abstract
An electrostatic chuck and an electrostatic adsorption apparatus are provided. According to one or more exemplary embodiments, an electrostatic chuck includes: a main body portion including a body portion provided with a through-hole, and a transparent resin portion filled in the through-hole; a transparent cushion layer on the main body portion and covering the transparent resin portion; an electrode layer on the transparent cushion layer; and a dielectric layer on the electrode layer.
Claims13
An electrostatic chuck comprising:
- a main body portion including a body portion provided with a through-hole, and a transparent resin portion filled in the through-hole;
- a transparent cushion layer on the main body portion and covering the transparent resin portion;
- an electrode layer on the transparent cushion layer;
- and
- a dielectric layer on the electrode layer.
2 more elements
An electrostatic adsorption apparatus comprising:
- an electrostatic chuck comprising:
- a main body portion including a body portion provided with a through-hole, and a transparent resin portion filled in the through-hole;
- a transparent cushion layer on the main body portion and covering the transparent resin portion;
- an electrode layer on the transparent cushion layer;
- and
- a dielectric layer on the electrode layer;
- an illumination device arranged below the main body portion and corresponding to the transparent resin portion;
- and
- a camera arranged above the dielectric layer and corresponding to the transparent resin portion.
6 more elements
Dependencies are inferred from the claim text.