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US 2018/0123016 A1Published application
Microelectronic structures with suspended lithium-based thin films
AssigneesCarnegie Mellon University, University of Pennsylvania
InventorsSongbin Gong, Gianluca Piazza
Life of this patent
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Abstract
In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.
Claims14
A microelectronic device, co p sing:
- a suspended lithium-based thin film, and
- one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.
-45. (canceled)
Dependencies are inferred from the claim text.