Thin film transistor and display substrate having the same
AssigneeSamsung Display Co., Ltd.
InventorsJong Yun KIM, Taekyung AHN, YOUNGDAE KIM
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Abstract
A display substrate including a base substrate, a first thin film transistor disposed on the base substrate and including a first gate electrode and a first semiconductor active layer; a second thin film transistor electrically connected to the first thin film transistor, the second thin film transistor including a second gate electrode and a second semiconductor active layer; and an organic light emitting device electrically connected to the second thin film transistor. The first semiconductor active layer includes a first material and the second semiconductor active layer includes a second material different from the first material.
Claims1
A display substrate, comprising:
- a base substrate;
- a first thin film transistor disposed on the base substrate and comprising a first gate electrode and a first semiconductor active layer;
- a second thin film transistor electrically connected to the first thin film transistor, the second thin film transistor comprising a second gate electrode and a second semiconductor active layer;
- and
- an organic light emitting device electrically connected to the second thin film transistor,
- wherein:
- the first semiconductor active layer comprises a first material and the second semiconductor active layer comprises a second material different from the first material;
- the first thin film transistor comprises a first source electrode connected to one side of the first semiconductor active layer and a first drain electrode connected to an other side of the first semiconductor active layer, and the second film transistor comprises a second source electrode connected to one side of the second semiconductor active layer and a second drain electrode connected to an other side of the second semiconductor active layer;
- each of the first source electrode, the second source electrode, the first drain electrode, and the second drain electrode comprises:
- a first conductive layer comprising one of copper, a copper alloy, aluminum, and an aluminum alloy;
- a second conductive layer disposed on the first conductive layer;
- and
- a third conductive layer disposed under the first conductive layer;
- each of the second conductive layer and the third conductive layer comprises a molybdenum-nickel-titanium alloy;
- and
- the molybdenum-nickel-titanium alloy contains nickel of about 15 at % to about 30 at % with respect to an aggregate of the molybdenum-nickel-titanium alloy, and titanium of about 10 at % to about 20 at % with respect to the aggregate of the molybdenum-nickel-titanium alloy.
Dependencies are inferred from the claim text.