Laminate structure of thin film transistor
AssigneeMicrocosm Technology Co., Ltd.
InventorsPo-Tsun Liu, Sung-Wei Hung, Bo-Hung Lai
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Abstract
A laminate structure of a thin film transistor includes a thin film transistor array and a passivation layer. The thin film transistor array includes a gate, a channel layer formed on the gate, a gate insulating layer forming between the gate and the channel layer, and a source and a drain forming on both sides of the channel layer. The passivation layer is formed on the thin film transistor array, and the passivation layer has at least one contact hole exposing the source or the drain, wherein the passivation layer is an oxazole-containing photosensitive polyimide (PSPI) resin.
Claims8
A laminate structure of a thin film transistor, comprising:
- a thin film transistor array, the thin film transistor array comprising:
- a gate;
- a channel layer, formed on the gate;
- a gate insulating layer, formed between the gate and the channel layer;
- and
- a source and a drain, respectively Ruined on both sides of the channel layer;
- and
- a passivation layer, formed on the thin film transistor array, and the passivation layer has at least one contact hole exposing the source or the drain, wherein the passivation layer is an oxazole-containing photosensitive polyimide (PSPI) resin, and the oxazole-containing photosensitive polyimide resin is a copolymer comprising a unit represented by formula (1), a unit represented by formula (2) and a unit represented by formula (3):
- in formula (1) to formula (3), Ar1 is selected from the group consisting of formula (4) to formula (11):
- wherein X is —O—, —C—, —C(CF3)2—, —C(CH3)2—, —CO—, or —SO2—;
- Ar2 is selected from the group consisting of formula (12) to formula (14):
- wherein Y is —O—, —CH2—, —C(CF3)—, —C(CH3)2—, —CO—, —SO2—, —S—,
- R is OH, COOH, or COOR*, R* represents
- Ar3 is selected from the group consisting of formula (15):
- wherein m represents an integer of 1 to 20.
(canceled)
Dependencies are inferred from the claim text.