Array substrate and method of manufacturing the same, and display device
AssigneeBoe Technology Group Co., Ltd.
InventorsJing Niu, Shuang Sun, Fangzhen Zhang, Dongcan Mi
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AssigneeBoe Technology Group Co., Ltd.
InventorsJing Niu, Shuang Sun, Fangzhen Zhang, Dongcan Mi
Estimating the term…
Embodiments of the disclosure provide an array substrate and a manufacturing method thereof, and a display device. The method includes: forming a semiconductor material film, a first insulation material film and a first conductive material film successively on a base substrate, and processing these films through a single patterning process to form an active pattern, a gate insulation pattern and a gate electrode; forming a second insulation layer and forming two contact holes in the second insulation layer and gate insulation pattern; forming a second conductive material film and forming two contact structures from portions of this layer; and forming a third conductive material film, and processing this layer through a single patterning process to form a pixel electrode, and source and drain electrodes being in direct contact with the two contact structures respectively, the pixel electrode and one contact structure being integrated into one piece.
A method of manufacturing an array substrate, comprising steps of:
An array substrate, comprising:
Dependencies are inferred from the claim text.