Systems and methods for imaging using single photon avalanche diodes
AssigneeThe Trustees of Columbia University in the City of New York
InventorsKenneth L. Shepard, Ryan Michael Field
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Abstract
Single-photon avalanche diode includes a central junction having a central p+ area and a deep-n well in contact with the central p+ area, a p-type guard ring disposed between the central junction and the deep-n well, and a shallow trench isolation separated from the central p+ area. Imaging apparatus includes a plurality of pixels, each pixel comprising a complementary metal-oxide-semiconductor-implemented single photon avalanche device and one or more signal converters electrically coupled thereto and configured to detect changes in output therefrom.
Claims21
A single-photon avalanche diode comprising:
- a central junction including a central p+ area and a deep-n well in contact with the central p+ area;
- a p-type guard ring disposed between the central junction and the deep-n well;
- and
- a shallow trench isolation separated from the central p+ area.
An imaging apparatus, comprising:
- a plurality of pixels, each pixel comprising a complementary metal-oxide-semiconductor-implemented single photon avalanche device and one or more signal converters electrically coupled thereto and configured to detect changes in output therefrom.
Dependencies are inferred from the claim text.