Fabricating Memory Devices with Optimized Gate Oxide Thickness
AssigneeMarvell World Trade Ltd.
InventorsRunzi Chang, Winston Lee, Peter Lee
Life of this patent
Estimating the term…
Loading patent…
AssigneeMarvell World Trade Ltd.
InventorsRunzi Chang, Winston Lee, Peter Lee
Estimating the term…
The present disclosure describes apparatuses and methods for manufacturing programmable memory devices with optimized gate oxide thickness. In some aspects, lithography masks are used to fabricate oxide gates for programmable memory devices of an integrated-circuit (IC) die that are thinner than oxide gates fabricated for processor core devices of the IC die. In other aspects, lithography masks are used to fabricate oxide gates for the programmable memory devices of the IC die such that they are thicker than the oxide gates fabricated for the processor core devices of the IC die. By so doing, the programmable memory devices can be manufactured with optimized gate oxide thickness that may reduce programming voltage or increase device reliability of the programmable memory devices.
A method comprising:
A method comprising:
An integrated-circuit (IC) die comprising:
The IC die of 15, wherein the third thickness of oxide gates of the non-volatile programmable memory devices is thinner than the second thickness of the oxide gates of the processor devices.
Dependencies are inferred from the claim text.