Methods of forming transistor devices with different threshold voltages and the resulting devices
AssigneeGlobalfoundries Inc.
InventorsHoon Kim, Ruilong Xie, Min Gyu Sung, Chanro Park
Life of this patent
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AssigneeGlobalfoundries Inc.
InventorsHoon Kim, Ruilong Xie, Min Gyu Sung, Chanro Park
Estimating the term…
A device includes a first transistor device having a first threshold voltage and including a first gate electrode structure positioned in a first gate cavity. The first gate electrode structure includes a first gate insulation layer, a first barrier layer, a first work function material layer formed above the first barrier layer, a second barrier layer formed above the first work function material layer, and a first conductive material formed above the second barrier layer. A second transistor device has a second threshold voltage different than the first threshold voltage and includes a second gate electrode structure positioned in a second cavity defined in the dielectric layer. The second gate electrode structure includes a second gate insulation layer, a second work function material layer, the second barrier layer formed above the second work function material layer, and a second conductive material formed above the second barrier layer.
A device, comprising:
A device, comprising:
Dependencies are inferred from the claim text.