Transfer Head for Transferring Micro Element and Transferring Method of Micro Element

A transfer method for transferring micro elements, the method comprising:

• (1) placing at least one micro element over a first substrate;
• (2) using a transfer head of to orient and contact the micro element, wherein:
• the transfer head comprises:
• a cavity;
• a plurality of vacuum paths connected with the cavity respectively and including valves for opening/closing;
• a plurality of suction nozzles connected with the vacuum paths configured to hold or release the micro elements via vacuum pressure transmitted by each vacuum path;
• and
• a switching component for controlling the valves to open/close the vacuum paths, so as to control the suction nozzles to hold or release required micro elements via vacuum pressure;
• the suction nozzle holds the micro element via vacuum pressure, and controls each vacuum path valve via the switching component for controlling the opening or closing of the vacuum path so as to extract required micro element;
• and
• (3) orienting the transfer head with extracted micro element towards the second substrate, wherein, the suction nozzle releases the micro element via vacuum pressure, and controls each vacuum path valve via the switching component for controlling the opening or closing of the vacuum path so as to release the extracted micro element over the second substrate.