Wafer Chuck Apparatus With Micro-Channel Regions
AssigneeUltratech, Inc.
InventorsRaymond Ellis, A.J. Crespin
Life of this patent
Estimating the term…
Abstract
The wafer chuck apparatus has a chuck body that includes an interior and a top surface. A plurality of micro-channel regions is formed in the top surface. Each micro-channel region is defined by an array of micro-channel sections that are in pneumatic communication with each other. The micro-channel regions are pneumatically isolated from each other. One or more vacuum manifold regions are defined in the chuck body interior and are in pneumatic communication with corresponding micro-channel regions through respective vacuum holes. The configuration of the micro-channel regions makes the wafer chuck apparatus particularly useful in chucking wafers that have a substantial amount of warp.
Claims16
A chuck apparatus for supporting a wafer, comprising:
- a chuck body having a center, an interior and a top side with a top surface;
- a plurality of micro-channel regions formed in the top surface, with each micro-channel region comprising an array of concentric arcuate micro-channel sections that are in pneumatic communication with one another, the micro-channel regions being pneumatically isolated from one another;
- and
- at least one vacuum manifold region defined in the chuck body interior and that is in pneumatic communication with each of the micro-channel regions through respective vacuum holes.
A chuck apparatus for securing a wafer, comprising:
- a chuck body having a center, an interior and a top side with a top surface;
- a plurality of micro-channel regions formed in the top surface, with each micro-channel region comprising an array of micro-channel sections that are defined by sidewalls and that are in pneumatic communication with one another through grooves in the sidewalls, the micro-channel regions being pneumatically isolated from one another;
- and
- at least one vacuum manifold region defined in the chuck body interior and that is in pneumatic communication with each of the micro-channel regions through respective vacuum holes.
Dependencies are inferred from the claim text.