Substrate Transfer Apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorsDae Wee Kong, Kang Min Park, Chul Hwan Choi, Yong Joon Hong, Kang Soo Kim, Sang-Ho Roh, Heok Jae Lee, Sang Jin Choi
Life of this patent
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Abstract
A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.
Claims20
A substrate transfer apparatus comprising:
- a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface;
- and
- a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber,
- wherein the chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.
A substrate transfer apparatus comprising:
- a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface;
- and
- a fan filter unit disposed on the upper surface of the chamber and configured to allow air to be introduced into the chamber,
- wherein the fan filter unit protrudes downwardly from the upper surface toward the lower surface to allow the air to be blown radially into the chamber.
A substrate transfer apparatus comprising:
- a chamber including a lower wall, an upper wall and a side wall extending between the lower wall and the upper wall;
- and
- a fan filter unit on the upper wall,
- wherein the fan filter unit is configured to draw external air into the chamber and direct the air toward or along an inner surface of the side wall.
Dependencies are inferred from the claim text.