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US 2018/0122670 A1Published application
Removable substrate plane structure ring
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsErnest E. Allen, Richard John Hertel, Jay R. Wallace, Keith A. Miller
Life of this patent
Estimating the term…
Abstract
An apparatus may include a platen to hold a substrate. A substrate plane structure may be disposed in front of the platen. The substrate plane structure has an opening therein. The apparatus may further include a removable structure disposed in the opening of the substrate plane structure. The removable structure may have an opening exposing a surface of the platen.
Claims20
An apparatus, comprising:
- a platen to hold a substrate;
- a substrate plane structure disposed in front of the platen, the substrate plane structure having an opening therein;
- and
- a removable structure disposed in the opening of the substrate plane structure, the removable structure having an opening exposing a surface of the platen.
1 more element
An apparatus, comprising:
- a platen to hold a substrate;
- a substrate plane structure disposed in front of the platen, the substrate plane structure having an opening therein;
- and
- a removable ring structure disposed in the opening of the substrate plane structure, the removable ring structure having an opening exposing a surface of the platen.
1 more element
An apparatus, comprising:
- a platen;
- a substrate coupled to the platen;
- a substrate plane structure disposed in front of the platen and having an opening therein, the substrate plane structure having a front surface aligned with a front surface of the substrate;
- and
- a removable ring structure disposed in the opening of the substrate plane structure, the removable ring structure having an opening in which the substrate is disposed.
2 more elements
Dependencies are inferred from the claim text.