Loading patent…
AssigneesSemiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
InventorsQIANG WU, Xuan Liu, Shifeng He, Jianyao Liu
Estimating the term…
An apparatus for detecting a mark having first and second stripe groups on a substrate includes a detection module moveable over a surface of the substrate. The detection module includes a detection unit and a positioning unit configured to align the detection unit with the mark. The detection unit is configured to obtain data of the mark and operative to perform repeated acquisition operations on the first and second stripe groups of the mark. Each of the acquisition operations acquires data associated with the first stripe group or the second stripe group. The apparatus also includes a processing module configured to determine a positional deviation between the first stripe group and the second stripe group in response to the obtained data of the mark and data associated with a motion of the detection module.
An apparatus for detecting a plurality of marks on a substrate, each of the marks having a first stripe group and a second stripe group spaced apart from each other and disposed in parallel to each other, the apparatus comprising:
A method for detecting a mark on a substrate, the mark comprising a first stripe group having a plurality of stripes and a second stripe group having a plurality of stripes arranged in parallel to each other, the method comprising:
Dependencies are inferred from the claim text.