Apparatus and method for detecting overlay mark with bright and dark fields
AssigneesSemiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
InventorsSHIFENG HE, QIANG WU
Life of this patent
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Abstract
An apparatus for detecting a mark on a substrate is provided. The mark has a first stripe group and a second stripe group disposed in parallel to each other. The apparatus includes a detection module operative to move over a surface of the substrate. The detection module includes a detection unit for obtaining data from the mark and operative to perform repeated acquisition operations on the first stripe group and the second stripe group of the mark. Each of the acquisition operations acquires data associated with the first stripe group or the second stripe group of the mark. The detection module also includes a positioning unit for aligning the detection unit with the mark.
Claims20
An apparatus for detecting a plurality of marks on a substrate, each of the marks having a first stripe group and a second stripe group spaced apart from each other and disposed in parallel to each other, the apparatus comprising:
- at least one detection module moveable over a surface of the substrate along a first direction, the at least one detection module comprising:
- at least one detection unit configured to obtain data from a mark and operable to perform repeated acquisition operations on the first stripe group and the second stripe group of the mark, each of the acquisition operations acquiring data associated with the first stripe group or the second stripe group of the mark;
- and
- at least one positioning unit configured to align the at least one detection unit with the mark in the first direction.
A method for detecting a mark on a substrate, the mark comprising a first stripe group and a second stripe group arranged in parallel to each other, the method comprising:
- providing a detection module having a detection unit and a positioning unit disposed over a surface of the substrate, the detection module configured to move over the surface of the substrate in a first direction to obtain data of the mark;
- aligning the detection unit with the mark by the positioning unit;
- and
- operating the detection module to detect the mark.
Dependencies are inferred from the claim text.