Operating method of microwave heating device and microwave annealing process using the same

A microwave annealing process applying to a semiconductor device having dopant substance comprising:

• providing a microwave heating device including:
• a heating chamber arranged having an accommodation space in which a holder is disposed, and the holder has a plane for holding the semiconductor device having dopant substance;
• a plurality of microwave transmitters arranged outside the heating chamber to transmit microwaves into the heating chamber;
• a plurality of half-wave-rectified power supplies arranged to connect the microwave transmitters, and each of the half-wave-rectified power supplies has a capacitance respectively;
• and
• a plurality of longitudinal waveguides and a plurality of transverse waveguides installed in between the heating chamber and the microwave transmitters, wherein the directions of electric field polarization of the longitudinal waveguides are perpendicular to the plane of the holder, and the directions of electric field polarization of the transverse waveguides are parallel to the plane of the holder;
• adjusting the value of the capacitance of at least one of the half-wave-rectified power supplies, such that the microwave power pulse bandwidth of the microwave transmitters are extended to produce a plurality of overlapped couplings, thereby multiplying microwave mode numbers;
• and
• supplying power to the microwave transmitters by the half-wave-rectified power supplies so that the microwaves are guided into the heating chamber by the longitudinal waveguides and the transverse waveguides for exciting multiple microwave modes in the heating chamber;
• and
• applying microwave annealing process to the semiconductor device having dopant substance.

A manufactural process of a multi-mode microwave heating device comprising:

• providing a microwave heating device including:
• a heating chamber arranged having an accommodation space in which a holder is disposed, and the holder has a plane;
• a plurality of microwave transmitters arranged outside the heating chamber to transmit microwaves into the heating chamber;
• a plurality of half-wave-rectified power supplies arranged to connect the microwave transmitters, and the half-wave-rectified power supplies have capacitances;
• and
• a plurality of longitudinal waveguides and a plurality of transverse waveguides installed in between the heating chamber and the microwave transmitters, wherein the directions of electric field polarization of the longitudinal waveguides are perpendicular to the plane of the holder, and the directions of electric field polarization of the transverse waveguides are parallel to the plane of the holder;
• adjusting the value of the capacitance of at least one of the half-wave-rectified power supplies, such that the microwave power pulse bandwidth of the microwave transmitters are extended to produce a plurality of overlapped couplings, thereby multiplying microwave mode numbers;
• and
• supplying power to the microwave transmitters by the half-wave-rectified power supplies so that the microwaves are guided into the heating chamber by the longitudinal waveguides and the transverse waveguides for exciting multiple microwave modes in the heating chamber.