Heating device
AssigneeNgk Spark Plug Co., Ltd.
InventorNoriaki TOKUSHO
Life of this patent
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Abstract
A heating device includes a base body 2 that has a placement surface 2a for placing a wafer W thereon; a heating resistor 4 that is embedded in the base body 2; a cylindrical supporting body 3 that has one end surface 3a that is connected to a back surface 2b of the base body 2 that is on an opposite side of the placement surface 2a, the one end surface 3a having an open end; at least two supporting-body channels 5, 6 that are formed within a peripheral wall of the cylindrical supporting body 3; and a base-body channel 7 that is provided at only a portion of the base body 2 at an immediately overhead region of the cylindrical supporting body 3, and that extends through the base body 2 and connects the at least two supporting-body channels 5, 6 to each other.
Claims4
A heating device comprising:
- a cylindrical supporting body that has one end surface defining an open end, the cylindrical supporting body including a peripheral wall defining at least two supporting-body channels;
- a base body having a placement surface for placing a substrate thereon and a back surface opposite the placement surface with the one end surface of the cylindrical supporting body connected to the back surface of the base body, the base body defining a base-body channel at only a portion of the base body immediately overhead of the cylindrical supporting body, the base-body channel extending through the base body and connecting the at least two supporting-body channels to each other;
- and
- a heating resistor embedded in the base body.
Dependencies are inferred from the claim text.