Heating device and semiconductor manufacturing apparatus
AssigneeNissin Ion Equipment Co., Ltd.
InventorMasakazu ADACHI
Life of this patent
Estimating the term…
Abstract
A heating device is provided. The heating device includes a conveyance member that conveys a substrate between a heating position and a non-heating position, a support member that is provided on the conveyance member and that supports the substrate, a heater provided at the heating position and operable to heat a first surface of the substrate, and a heat reflecting plate attached to the conveyance member in facing relation to a second surface of the substrate opposite to the first surface.
Claims19
A heating device comprising:
- a conveyance member that conveys a substrate between a heating position and a non-heating position;
- a support member that is provided on the conveyance member and that supports the substrate;
- a heater provided at the heating position and operable to heat a first surface of the substrate;
- and
- a heat reflecting plate attached to the conveyance member in facing relation to a second surface of the substrate opposite to the first surface.
A semiconductor manufacturing apparatus comprising a heating device, wherein the heating device comprises:
- a conveyance member that conveys a substrate between a heating position and a non-heating position;
- a support member that is provided on the conveyance member and that supports the substrate;
- a heater provided at the heating position and operable to heat a first surface of the substrate;
- and
- a heat reflecting plate attached to the conveyance member in facing relation to a second surface of the substrate opposite to the first surface,
- wherein the semiconductor manufacturing apparatus is configured to transfer the substrate to the heater and immovably support the substrate on the heater to subject the substrate to a semiconductor manufacturing treatment.
A heating device comprising:
- an arm having a substrate support that supports a substrate attached thereto;
- a heater operable to heat a surface of the substrate;
- and
- a heat reflecting plate disposed between the arm and the substrate.
Dependencies are inferred from the claim text.