Sampling a composite signal relating to a plasma process
AssigneeTRUMPF Huettinger GmbH + Co. KG
InventorsAndre Grede, Christian Bock, Nikolai Schwerg
Life of this patent
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Abstract
Methods and devices for sampling a composite signal relating to a plasma process are provided. The composite signal has at least one plasma signal of interest and superimposed by at least one interfering signal. The methods include identifying the at least one interfering signal, digitalizing the composite signal by sampling the composite signal at a sampling frequency, and varying the sampling frequency during an operation of the plasma process according to at least one of a frequency of the at least one plasma signal of interest and a frequency of the at least one interfering signal.
Claims20
A method of sampling a composite signal associated with a plasma process, wherein the composite signal comprises at least one plasma signal of interest on which at least one interfering signal is superimposed, the method comprising:
- identifying at least one interfering signal;
- digitizing the composite signal by sampling the composite signal at a sampling frequency;
- and
- varying the sampling frequency during operation of the plasma process in dependence on at least one of (i) a frequency of the at least one plasma signal of interest and (ii) a frequency of the at least one interfering signal.
A device for sampling a composite signal associated with a plasma process, wherein the composite signal comprises at least one plasma signal of interest on which the at least one interfering signal is superimposed, the device comprising:
- a digital signal processor configured to identify and analyze at least one interfering signal;
- a sampling frequency generator connected to the digital signal processor and configured to:
- generate a sampling frequency for the composite signal based on a result of analyzing the at least one interfering signal, and
- vary the sampling frequency during an operation of the plasma process in dependence on at least one of a frequency of the at least one plasma signal of interest and a frequency of the at least one interfering signal;
- and
- an analogue/digital (A/D) converter connected to the digital signal processor and the sampling frequency generator and configured to:
- receive the sampling frequency, and
- digitize the composite signal by sampling the composite signal at the sampling frequency.
Dependencies are inferred from the claim text.