System and method for plasma head thermal control
AssigneeOntos Equipment Systems, Inc.
InventorsRobert Emmett HUGHLETT, Matthew Sheldon PHILLIPS, Eric Frank SCHULTE, Michael Dow STEAD
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Abstract
An atmospheric pressure plasma system includes an atmospheric pressure plasma source that generates a glow discharge-type plasma. The atmospheric pressure plasma source comprises a plasma head, a heating element and an active cooling element and the heating element and active cooling element control the plasma head temperature to a set-point temperature independent of variations in plasma generating power or plasma power ON/OFF status.
Claims20
An atmospheric pressure plasma system comprising:
- an atmospheric pressure plasma source that generates a glow discharge-type plasma;
- and
- wherein the atmospheric pressure plasma source comprises a plasma head, a heating element and an active cooling element and the heating element and active cooling element control the plasma head temperature to a set-point temperature independent of variations in plasma generating power or plasma power ON/OFF status.
A method of generating an atmospheric pressure plasma comprising:
- providing an atmospheric pressure plasma source that generates a glow discharge-type plasma, wherein the atmospheric pressure plasma source comprises a plasma head, a heating element and an active cooling element;
- activating simultaneously the heating element and the active cooling element to control the plasma head temperature to a set-point temperature independent of variations in plasma generating power or plasma power ON/OFF status.
Dependencies are inferred from the claim text.