Thin film inductor and method of manufacturing the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorJoung Gul RYU
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Abstract
A method of manufacturing a thin film inductor includes preparing a carrier film having a first surface on which a first upper separation layer is formed and a second surface on which a first lower separation layer is formed. A first upper layer, including a first upper coil pattern and a first upper insulating pattern, is formed on the first surface. A first lower layer, including a first lower coil pattern and a first lower insulating pattern, is formed on the second surface. A surface of the first upper layer is ground. A height of the first lower coil pattern is smaller than that of the first lower insulating pattern.
Claims19
A method of manufacturing a thin film inductor, the method comprising:
- (a) preparing a carrier film having a first surface on which a first upper separation layer is formed, and a second surface opposing the upper surface and on which a first lower separation layer is formed;
- (b) forming a first upper layer, including a first upper coil pattern and a first upper insulating pattern, on the first surface and forming a first lower layer, including a first lower coil pattern and a first lower insulating pattern, on the second surface;
- and
- (c) grinding a surface of the first upper layer,
- wherein a height of the first lower coil pattern is smaller than that of the first lower insulating pattern.
The method of claim 10, further comprising:
- with respect to the first body,
- (j) removing a portion of the first upper insulating layer and the second upper insulating pattern;
- (k) forming an insulating part around the first upper coil pattern and the second upper coil pattern using a build-up film;
- (l) forming a through hole in central portions of the first upper coil pattern and the second upper coil;
- and
- (m) forming upper and lower cover parts by compressing magnetic sheets on upper and lower portions of the first body.
A thin film inductor comprising:
- an insulating part including a support member and having a central portion including a core formed of a magnetic material;
- first and second coil patterns in the insulating part and electrically connected to each other by a via penetrating through the support member, with the support member interposed therebetween;
- and
- upper and lower cover parts formed of a magnetic material and on upper and lower portions of the insulating part, respectively,
- wherein the first coil pattern contains conductive particles and a binder, and the second coil pattern is a plating layer.
A method of manufacturing a thin film inductor, comprising:
- forming a first upper coil pattern on an upper surface of a carrier film;
- forming a first lower coil pattern on a lower surface of the carrier film opposing the upper surface of the carrier film;
- forming a first lower insulating pattern on the lower surface of the carrier film, wherein a height of the first lower coil pattern is smaller than a height of the first lower insulating pattern;
- and
- grinding the first upper coil pattern while supported via the first lower insulating pattern.
Dependencies are inferred from the claim text.