Inspection condition determination device, inspection condition determination method, and inspection condition determination program

An inspection condition determination method to be implemented by a computer, comprising:

• an addition step of adding data mimicking a flaw assumed to occur in an inspection target to a designated position of a three-dimensional model of the inspection target;
• a generation step of generating a first image by replicating an optical condition for capturing an image of the inspection target on the three-dimensional model, and a second image by replicating the optical condition on the three-dimensional model to which the data mimicking the flaw is added;
• a determination step of determining whether or not a difference between the first image and the second image at the designated position exceeds a threshold that allows detection of the flaw in the inspection target;
• and
• an extraction step of extracting an optical condition available for detecting flaws of multiple designated patterns from multiple optical conditions each being the replicated optical condition.

A non-transitory computer-readable medium storing an inspection condition determination program for causing a computer to execute:

• an addition step of adding data mimicking a flaw assumed to occur in an inspection target to a designated position or a three-dimensional model of the inspection target;
• a generation step of generating a first image by replicating an optical condition for capturing an image of the inspection target on the three-dimensional model, and a second image by replicating the optical condition on the three-dimensional model to which the data mimicking the flaw is added;
• a determination step of determining whether or not a difference between the first image and the second image at the designated position exceeds a threshold that allows detection of the flaw in the inspection target;
• and
• an extraction step of extracting an optical condition available for detecting flaws of multiple designated patterns from multiple optical conditions each being the replicated optical condition.