Substrate processing apparatus and non-transitory computer-readable recording medium

A non-transitory computer-readable medium storing therein a device status monitoring program executed in a substrate processing apparatus comprising:

• a pipe heater configured to heat a gas pipe;
• a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe;
• a control unit having a processor and a memory and operable to execute a process control program for monitoring and controlling parameters of a substrate processing, wherein the control unit is configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing the process control program to adjust an electrical power applied to the pipe heater;
• a memory unit configured to store a monitored item table defining:
• a FAULT item indicative of a fault;
• a DEVICE DATA item indicative of a type of device data for detecting the fault;
• a STATISTICAL DATA item indicative of statistical data obtained from the device data indicated by the DEVICE DATA item;
• a MONITORED STEP item indicative of a period being monitored to obtain the statistical data indicated by the STATISTICAL DATA item;
• and a RULE item indicative of diagnostic tool for diagnosing the fault indicated in the FAULT item;
• and a device status monitoring unit configured to execute the device status monitoring program, the device status monitoring program causing the substrate processing apparatus to perform:
• (a) collecting the device data representing the temperature and device data representing the electrical power transmitted from the control unit;
• (b) calculating current statistical data from the device data representing the temperature and the device data representing the electrical power;
• (c) comparing the current statistical data from the device data representing the temperature obtained from a step indicated in the MONITORED STEP item with a previous statistical data of device data representing temperature obtained from a step indicated in the MONITORED STEP item stored in the memory unit;
• and (d) comparing the current statistical data from the device data representing the electrical power obtained from the current step indicated in the MONITORED STEP item with a previous statistical data of device data representing electrical power obtained from the step obtained from the step indicated in the MONITORED STEP item stored in the memory unit to determine whether a difference between the current statistical data from the device data representing the electrical power and the previous statistical data of device data representing electrical power is equal to or smaller than a second reference value when a difference between the current statistical data from the device data representing the temperature and the previous statistical data of device data representing temperature is equal to or smaller than a first reference value.