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US 2018/0106680 A1Published application
Shield plate and measurement apparatus
AssigneeHamamatsu Photonics K.K.
InventorTomonori NAKAMURA
Life of this patent
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Abstract
A shield plate is a shield plate related to non-contact measurement of temperature of a semiconductor apparatus, and includes a base of which temperature is adjustable, in which the amount of thermal radiation of a blackbody surface located on one side of the base is larger than the amount of thermal radiation of a reflective surface located on a side opposite to the blackbody surface, and the blackbody surface is a blackbody surface that emits infrared rays.
Claims12
A shield plate used for non-contact measurement of temperature of a measurement target, the shield plate comprising:
- a base of which temperature is adjustable,
- wherein the amount of thermal radiation of a first surface located on one side of the base is larger than the amount of thermal radiation of a second surface located on a side opposite to the first surface, and
- the first surface is a blackbody surface configured to emit infrared rays.
Dependencies are inferred from the claim text.