Charged particle beam device

A charged particle beam apparatus comprising:

• a charged particle source unit that launches a charged particle beam;
• a blanking electrode unit that blanks the charged particle beam launched from the charged particle source unit;
• a deflecting electrode unit that deflects the charged particle beam launched from the charged particle source unit and passing through the blanking electrode unit;
• an objective lens unit that converges the charged particle beam deflected by the deflecting electrode unit and radiates the charged particle beam to a surface of a sample;
• a secondary charged particle detection unit that detects a secondary charged particle generated from the sample irradiated with the charged particle beam;
• a signal processing unit that processes a signal obtained by detecting the secondary charged particle by the secondary charged particle detection unit;
• and
• a control unit that controls the charged particle source unit, the blanking electrode unit, the deflecting electrode unit, the objective lens unit, the secondary charged particle detection unit, and the signal processing unit,
• wherein the control unit further includes a deflecting electrode control unit that controls the deflecting electrode unit, and the deflecting electrode control unit receives a signal for switching from ON to OFF of the voltage to be applied to the blanking electrode from the blanking electrode control unit and controls a signal to be applied to the deflecting electrode unit using information regarding a scanning direction of the charged particle beam on the sample by the deflecting electrode.