A single-drive rigid-flexible coupling precision motion platform, comprising a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform comprises a rigid frame, flexible hinges and a core motion platform;
- the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges;
- the core motion platform of the rigid-flexible coupling motion platform is connected with the linear driver;
- the rigid frame is connected with the linear guide rail fixed on the machine base through a guide rail sliding block;
- and the core motion platform drives the flexible hinges to generate elastic deformation under the action of the linear driver, and drives the rigid frame to freely move in a lengthwise direction of the linear guide rail through the flexible hinges;
- and
- the displacement sensor is connected with the core motion platform and is used for measuring a displacement of the core motion platform in a motion direction.