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US 2018/0093884 A1Published application
Method of manufacturing mems switches with reduced switching voltage
AssigneeInternational Business Machines Corporation
InventorsStephen E. LUCE, Anthony K. STAMPER
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Abstract
An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode, forming a second cantilevered electrode over an electrode and operable to contact the first cantilevered electrode upon an application of a voltage to the electrode, and forming an arm on the first cantilevered electrode with an extending protrusion extending upward from an upper surface of the arm.
Claims12
A method of fabricating a switch comprising:
- forming a first cantilevered electrode;
- forming a second cantilevered electrode over an electrode and operable to contact the first cantilevered electrode upon an application of a voltage to the electrode;
- and
- forming an arm on the first cantilevered electrode with an extending protrusion extending upward from an upper surface of the arm.
1 more element
Dependencies are inferred from the claim text.