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US 2018/0080831 A1Published application
Shield plate and measurement apparatus
AssigneeHamamatsu Photonics K.K.
InventorTomonori NAKAMURA
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Abstract
A shield plate that is used for non-contact measurement of a temperature of a measurement target is provided. The shield plate includes a base of which a temperature is adjustable. The base includes a central shield portion that is formed in the shield plate, an opening that is formed around the central shield portion, and a blackbody surface that is formed on one surface of the base to include a portion opposite to the opening with the central shield portion interposed therebetween and to radiate infrared rays.
Claims7
1:
- A shield plate used for non-contact measurement of a temperature of a measurement target, the shield plate comprising a base of which a temperature is adjustable,
- wherein the base comprises:
- a shield portion formed in the shield plate;
- an opening formed around the shield portion;
- and
- a blackbody portion formed on one surface of the base to comprise a portion opposite to the opening with the shield portion interposed therebetween and to radiate infrared rays.
3 more elements
2:
- The shield plate according to claim 1, wherein the opening is formed around the shield portion to be odd-fold rotationally symmetrical around the shield portion.
3:
- The shield plate according to claim 1, wherein the opening is formed in an annular shape around the blackbody portion.
4:
- The shield plate according to claim 1, wherein the opening is formed to decrease in size from the one surface of the base to the other surface of the base.
5:
- A measurement apparatus for performing non-contact measurement of a temperature of a measurement target, the measurement apparatus comprising:
- the shield plate according to claim 1 disposed such that one surface of the base is opposite to the measurement target;
- an optical system configured to guide infrared rays passing through the opening of the shield plate;
- an infrared detector optically coupled to the optical system, configured to detect the guided infrared rays, and output a detection signal;
- a temperature controller configured to control a temperature of the shield plate;
- and
- calculator configured to calculate the temperature of the measurement target based on the detection signal,
- wherein the shield plate is disposed such that the shield portion is located on an optical axis of the optical system.
5 more elements
6:
- The measurement apparatus according to claim 5, wherein the temperature controller controls the temperature of the base of the shield plate such that the temperature is controlled to be at least a first temperature and a second temperature different from the first temperature, and
- the calculator calculates the temperature of the measurement target based on the detection signal at the first temperature and the detection signal at the second temperature.
7:
- The measurement apparatus according to claim 5, wherein the infrared detector is a two-dimensional infrared detector.