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AssigneeMacau University of Science and Technology
InventorsNaiqi Wu, Fajun Yang, Yan Qiao, Mengchu Zhou, Zhiwu Li
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A system and method of controlling a cluster tool apparatus, wherein the cluster tool includes one or more processing modules and a robot that is configured to move a semiconductor product to and from the one or more processing modules, the cluster tool configured for processing semiconductor products. The method of controlling the cluster tool apparatus to perform a processing cycle includes receiving a plurality of system parameters from a user interface, wherein the system parameters relate to one or more processing steps of the processing cycle, determining a schedule for performing the processing cycle utilizing the one or more processing modules, wherein the schedule being determined based on a semiconductor product residency parameter.
A method of controlling a cluster tool apparatus, wherein the cluster tool includes one or more processing modules and a robot that is configured to move a semiconductor product to and from the one or more processing modules, the cluster tool configured for processing semiconductor products, the method of controlling the cluster tool apparatus to perform a processing cycle comprises the steps of:
A cluster tool apparatus for processing a semiconductor product, the cluster tool apparatus comprising;
Dependencies are inferred from the claim text.