Vortical atomizing nozzle assembly, vaporizer, and related methods for substrate processing systems

A method to introduce a vaporized liquid into a substrate processing system using a vaporizer chamber and a nozzle assembly coupled to the vaporizer chamber, comprising:

• introducing a liquid into a premix chamber for the nozzle assembly through a liquid inlet for the premix chamber, the nozzle assembly also comprising an outlet channel coupled to the premix chamber and an expanding nozzle coupled to the outlet channel;
• while introducing the liquid into the premix chamber, also introducing a carrier gas into the premix chamber through a gas inlet for the premix chamber to generate a premixed liquid;
• passing the premixed liquid from the premix chamber through the outlet channel and the expanding nozzle to facilitate vaporization of the premixed liquid;
• and
• injecting the premixed liquid from expanding nozzle into the vaporizer chamber through an inlet for the vaporizer chamber;
• wherein the carrier gas is introduced through the gas inlet for the premix chamber using a carrier gas channel positioned with respect to the gas inlet for the premix chamber to cause a vortical flow within the premix chamber.