Repatternable nanoimprint lithography stamp
AssigneeInternational Business Machines Corporation
InventorsBRANDON M. KOBILKA, JOSEPH KUCZYNSKI, JASON T. WERTZ
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Abstract
A repatternable nanoimprint lithography stamp includes a magnetic substrate and magnetic core nanoparticles. The magnetic substrate includes a magnet and a magnetic mask, and the magnetic core nanoparticles are arranged in a pattern on a surface of the magnetic substrate. The pattern is defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask.
Claims20
A repatternable nanoimprint lithography stamp comprising:
- a magnetic substrate that includes a magnet and a magnetic mask;
- and
- magnetic core nanoparticles arranged in a pattern on a surface of the magnetic substrate, the pattern defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask.
The repatternable nanoimprint lithography stamp of claim 6, wherein the bridged flourosilane includes a vinyl-bridged flourosilane.
A process comprising:
- forming a patterned magnetic substrate that includes magnetic core nanoparticles arranged in a pattern on a surface of a magnetic substrate, wherein the magnetic substrate includes a magnet and a magnetic mask, and wherein the pattern of the magnetic core nanoparticles is defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask;
- and
- utilizing the patterned magnetic substrate as a repatternable nanoimprint lithography stamp.
A nanoimprint lithography process comprising:
- forming a patterned magnetic substrate that includes magnetic core nanoparticles arranged in a first pattern on a surface of a magnetic substrate, wherein the magnetic substrate includes a magnet and a magnetic mask, and wherein the first pattern of the magnetic core nanoparticles is defined by selective application of a magnetic field to the magnetic substrate using the magnet and the magnetic mask;
- utilizing the patterned magnetic substrate to perform a first nanoimprint lithography stamping operation;
- removing the magnetic core nanoparticles from the surface of the magnetic substrate by reversing a polarity of the magnetic field;
- forming a second patterned magnetic substrate that includes magnetic core nanoparticles arranged in a second pattern on the surface of the magnetic substrate;
- and
- utilizing the second patterned magnetic substrate to perform a second nanoimprint lithography operation.
Dependencies are inferred from the claim text.