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US 2018/0052089 A1Published application
Measuring arrangement and method of directing and detecting particles
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsKarl Haberger, Katrin Moebius
Life of this patent
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Abstract
A measuring arrangement includes an electrostatic concentrator, a surface and an imaging sensor which are configured to detect particles.
Claims26
A measuring arrangement comprising:
- an electrostatic concentrator configured to direct particles to be verified toward a surface;
- an imaging sensor configured to detect the particles directed onto the surface;
- the electrostatic concentrator comprising a field electrode which is arranged in the surface or on the surface or adjacently to the surface and is configured to generate an inhomogeneous electrostatic field so as to direct the particles to be verified toward the surface.
A method of detecting particles, comprising;
- directing particles to be verified toward a surface on the part of an electrostatic concentrator;
- detecting the particles directed onto the surface on the part of an imaging sensor;
- the electrostatic concentrator comprising a field electrode which is arranged in the surface or on the surface or adjacently to the surface, and generates an inhomogeneous electrostatic field so as to direct the particles to be verified toward the surface.
Dependencies are inferred from the claim text.