Hybrid mems microfluidic gyroscope

A hybrid MEMS microfluidic gyroscope, comprising:

• a micro-machined base enclosure having a top fluid enclosure, a fluid sensing enclosure and a bottom fluid enclosure, the top fluid enclosure is constructed by partially etching or machining glass, thereby creating a pair of discrete canals on a bottom side of the top fluid enclosure, the fluid sensing enclosure is constructed from a layer of MEMS grade silicon which is micro machined to include a sensing structure, which is accessible to a fluid via an opening on either side of the fluid sensing enclosure and the bottom fluid enclosure is constructed by partially etching or machining glass, thereby creating two discrete canals on a top side of the bottom fluid enclosure;
• a plurality of piezo-resistors disposed within the micro-machined base enclosure, the piezo-resistors is deformed by the fluid, the fluid prevents gravitational forces asserted onto the hybrid MEMS microfluidic gyroscope from affecting the piezo-resistors;
• and a single membrane disposed within the micro-machined base enclosure, wherein angular rotation of the hybrid MEMS microfluidic gyroscope creates an inertial force, which increases pressure on the single membrane, leading to a detectable deflection that is proportional to the angular rotation.