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US 2018/0038752 A1Published application
Absolute Pressure Sensor
AssigneeDENSO International America, Inc.
InventorsKazuhisa NAKAGAWA, Brett THOMAS
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Abstract
An absolute pressure sensor assembly configured to generate a pressure output representing pressure of a target media modified to take into account pressure loss of a sensor cavity of the absolute pressure sensor.
Claims18
An absolute pressure sensor assembly comprising:
- a first diaphragm between a sensor cavity sealed under vacuum and a pressure media to be measured;
- a first strain gauge of the first diaphragm configured to measure pressure of the pressure media relative to pressure of the sensor cavity;
- a second diaphragm between an error cavity sealed under vacuum and an error counter-cavity sealed under vacuum;
- and
- a second strain gauge of the second diaphragm configured to measure pressure of the error counter-cavity relative to the error cavity to identify a pressure error of the absolute pressure sensor assembly;
- wherein the absolute pressure sensor assembly is configured to generate a pressure output that includes the pressure of the pressure media as measured by the first strain gauge modified by the pressure error measured by the second strain gauge.
3 more elements
A method for measuring pressure of a pressure media with an absolute pressure sensor assembly, the method comprising:
- measuring pressure of the pressure media relative to pressure of a sensor cavity sealed under vacuum;
- measuring pressure of an error cavity sealed under vacuum relative to pressure of an error counter-cavity to identify a pressure error of the absolute pressure sensor assembly;
- and
- generating a pressure output that includes the pressure of the pressure media modified by the pressure error.
1 more element
Dependencies are inferred from the claim text.