# US 2018/0026414 A1 · Laser unit and non-transitory computer-readable storage medium

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- Number: US 2018/0026414 A1
- Document ID: US20180026414A1
- Status: Published application
- Kind: A1
- Application number: 15/720,122
- Filed: 2017-09-29
- Published: 2018-01-25
- Earliest claimed: 2013-11-05
- Assignees: Gigaphoton Inc.
- Applicants: Gigaphoton Inc.
- Inventors: Akihiko KUROSU; Takashi MATSUNAGA; Hiroyuki MASUDA; Osamu WAKABAYASHI; Hiroaki TSUSHIMA; Masanori YASHIRO; Takeshi OHTA
- Web page: https://patentgrep.com/patent/US20180026414A1

## CPC

- H01S 3/036: Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)}
- H01S 3/0404: {Air- or gas cooling, e.g. by dry nitrogen}
- H01S 3/09702: {Details of the driver electronics and electric discharge circuits}
- H01S 3/0971: transversely excited (H01S3/0975 takes precedence)
- H01S 3/104: in gas lasers
- H01S 3/03: of gas laser discharge tubes
- H01S 3/0407: {Liquid cooling, e.g. by water}
- H01S 3/041: for gas lasers {(H01S3/0401 takes precedence)}
- H01S 3/08009: {using a diffraction grating}
- H01S 3/08031: Single-mode emission
- H01S 3/1306: {Stabilisation of the amplitude}
- H01S 3/134: in gas lasers
- H01S 3/2258: {F2, i.e. molecular fluoride is comprised for lasing around 157 nm}
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.

## Claims

### Claim 1

A laser unit comprising:
a pair of electrodes;
a fan configured to make flow of gas fed to a clearance between the electrodes;
a motor configured to rotate the fan; and
a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit,
the electric power consumed by the laser unit including electric power consumed by the motor,
the electric energy consumed by the laser unit including electric energy consumed by the motor,
the electric power consumed by the motor being calculated based on pressure of the gas fed to the clearance between the electrodes, and
the electric energy consumed by the motor being calculated based on the pressure of the gas fed to the clearance between the electrodes.

### Claim 2 (depends on 1)

The laser unit according to claim 1, further comprising a charger configured to apply a voltage between the electrodes, wherein
the electric power consumed by the laser unit includes one or more of electric power consumed by the charger, the electric power consumed by the motor, and a sum of the electric power consumed by the charger and the electric power consumed by the motor, and
the electric energy consumed by the laser unit includes one or more of electric energy consumed by the charger, the electric energy consumed by the motor, and a sum of the electric energy consumed by the charger and the electric energy consumed by the motor.

### Claim 3 (depends on 2)

The laser unit according to claim 2, wherein the electric energy consumed by the charger is obtained by integrating the electric energy consumed through applying the voltage to the pair of electrodes.

### Claim 4 (depends on 2)

The laser unit according to claim 2, further comprising a standby-power supply configured to supply the laser unit with standby electric power, wherein
the electric power consumed by the laser unit includes a sum of electric power consumed by the charger, the electric power consumed by the motor, and electric power consumed by the standby-power supply, and
the electric energy consumed by the laser unit includes a sum of electric energy consumed by the charger, the electric energy consumed by the motor, and electric energy consumed by the standby-power supply.

### Claim 5 (depends on 2)

The laser unit according to claim 2, further comprising a controller configured to calculate one or both of the electric power consumed by the laser unit and the electric energy consumed by the laser unit.

### Claim 6 (depends on 5)

The laser unit according to claim 5, wherein the controller further controls a flow rate of water cooling at least the charger and the motor, based on one or both of the electric power consumed by the laser unit and the electric energy consumed by the laser unit.

### Claim 7 (depends on 5)

The laser unit according to claim 5, wherein the controller further controls a flow rate of air cooling at least the charger and the motor, based on one or both of the electric power consumed by the laser unit and the electric energy consumed by the laser unit.

### Claim 8 (depends on 5)

The laser unit according to claim 5, further comprising:
a laser resonator configured to amplify light resulting from applying the voltage to the pair of electrodes;
an optical system configured to guide the light amplified by the laser resonator; and
an oxygen concentration meter configured to measure concentration of oxygen in gas passing through the optical system, wherein
the controller further controls a flow rate of the gas passing through the optical system, based on the concentration of the oxygen in the gas passing through the optical system.

### Claim 9 (depends on 5)

The laser unit according to claim 5, further comprising an energy dispersion measurement device configured to measure energy dispersion of laser light emitted from the laser unit, wherein
the controller further controls, based on the energy dispersion, composition of the gas fed to the clearance between the electrodes.
