# US 2018/0025953 A1 · Inspecting method for inspecting influence of installation environment upon processing apparatus

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- Number: US 2018/0025953 A1
- Document ID: US20180025953A1
- Status: Published application
- Kind: A1
- Application number: 15/647,998
- Filed: 2017-07-12
- Published: 2018-01-25
- Earliest claimed: 2016-07-19
- Assignees: Disco Corporation
- Applicants: Disco Corporation
- Inventors: Hiroyuki Yoshihara
- Web page: https://patentgrep.com/patent/US20180025953A1

## CPC

- H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting}
- B23K 26/0626: {Energy control of the laser beam (B23K26/0622 takes precedence)}
- B23K 26/08: Devices involving relative movement between laser beam and workpiece
- G01R 31/2851: {Testing of integrated circuits [IC] (G01R31/317 takes precedence; testing individual devices G01R31/26; testing printed circuits G01R31/2801)}
- H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection}
- H10P 72/0612: {Production flow monitoring, e.g. for increasing throughput}
- H10P 72/0616: {Monitoring of warpages, curvatures, damages, defects or the like}
- H10P 72/53: {using optical controlling means}
- H10P 74/235: {comprising optical enhancement of defects or not-directly-visible states}
- G01R 31/2881: {related to environmental aspects other than temperature, e.g. humidity or vibrations}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A method for inspecting the influence of an installation environment upon a processing apparatus includes setting a mark for specifying a relative positional relation between a chuck table and a processing unit, imaging the mark plural times by using an imaging unit when a moving unit is at rest, and detecting the position of the mark from an image and then determining whether or not the influence of the installation environment upon the processing apparatus is present based on whether the change in position of the mark is less than or more than a threshold.

## Claims

### Claim 1

An inspecting method for inspecting the influence of an installation environment upon a processing apparatus including a chuck table for holding a workpiece, a processing unit processing said workpiece held on said chuck table, moving mechanism for relatively moving said chuck table and said processing unit, and an imaging unit fixed to said processing unit to image said workpiece held on said chuck table, said inspecting method comprising:
a mark setting step of setting a mark for specifying a relative positional relation between said chuck table and said processing unit;
an imaging step of imaging said mark plural times by using said imaging unit in the condition where said moving mechanism is at rest; and
a determining step of detecting the position of said mark from an image obtained by said imaging step and then determining whether or not the influence of said installation environment upon said processing apparatus is present;
said determining step being performed in such a manner that when the amount of change in position of said mark is less than a threshold, it is determined that the relative positional relation between said chuck table and said processing unit is not influenced by said installation environment, whereas when the amount of change in position of said mark is greater than or equal to said threshold, it is determined that the relative positional relation between said chuck table and said processing unit is influenced by said installation environment.

### Claim 2 (depends on 1)

The inspecting method according to claim 1, wherein said imaging step includes setting the distance between said imaging unit and said chuck table so that said imaging unit focuses said mark, and next starting to image said mark.

### Claim 3 (depends on 1)

The inspecting method according to claim 1, wherein said mark is set on said chuck table or on an object held on said chuck table.