# US 2018/0025900 A1 · Alkali metal and alkali earth metal reduction

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- Number: US 2018/0025900 A1
- Document ID: US20180025900A1
- Status: Published application
- Kind: A1
- Application number: 15/217,651
- Filed: 2016-07-22
- Published: 2018-01-25
- Earliest claimed: 2016-07-22
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Soonam Park; Mang-Mang Ling; Toan Q. Tran; Dmitry Lubomirsky
- Web page: https://patentgrep.com/patent/US20180025900A1

## CPC

- H10P 70/20: {Cleaning during device manufacture}
- H10P 50/242: {of Group IV materials}
- H10P 50/267: {using plasmas}
- H10P 50/283: {by chemical means}
- H10P 50/287: {by chemical means}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Methods of removing contamination from the surface of a substrate are described. The etch selectively removes alkali metals and alkali earth metals from substrates. The alkali metals may include sodium, lithium, rubidium or potassium and the alkali earth metals may include calcium. For example, the etch may remove contaminants by generating and then desorbing volatile chemical species from the substrate. A hydrogen-and-oxygen-containing precursor or combination of precursors is flowed into a remote plasma to form plasma effluents. The plasma effluents are then flowed into the substrate processing region to react with the substrate and remove an alkali metal and/or an alkali earth metal from the surface of the substrate. No local plasma excites the plasma effluents in embodiments.

## Claims

### Claim 1

A method of cleaning a substrate, the method comprising:
etching a substrate, wherein etching the substrate contaminates an exposed portion of the substrate with a first concentration of a contaminant selected from the group of elements consisting of sodium, potassium, lithium, rubidium and calcium, wherein the first concentration is greater than 1×1011/cm2; and
reducing a concentration of the contaminant to below a second concentration of 1×10/cm2 by exposing the substrate to plasma-excited species formed in a remote plasma from a hydrogen-and-oxygen-containing precursor.

### Claim 2 (depends on 1)

The method of claim 1 wherein etching the substrate and reducing the concentration of the contaminant occur in the same substrate processing region without transferring the substrate from one substrate processing chamber to another.

### Claim 3

A method of removing a contaminant from a surface of a substrate, the method comprising:
placing the substrate into a substrate processing region of a substrate processing chamber, wherein the substrate comprises an exposed portion;
etching the substrate by flowing an etching precursor into the substrate processing region while forming a local plasma in the substrate processing region, wherein etching the substrate redistributes a contaminant from an interior surface of the substrate processing chamber onto the substrate raising a first concentration of the contaminant above 1×1011/cm2;
flowing a second precursor into a remote plasma region within the substrate processing chamber and fluidly coupled to the substrate processing region by a showerhead;
forming plasma effluents by forming a remote plasma in the remote plasma region;
flowing the plasma effluents through the showerhead into the substrate processing region;
removing a portion of the contaminant from the surface of the substrate;
reducing a contamination from the first concentration to below 1×1010/cm2; and
removing the substrate from the substrate processing region.

### Claim 4 (depends on 3)

The method of claim 3 wherein the contaminant comprises sodium (Na), potassium (K), lithium (Li), rubidium (Rb) or calcium (Ca).

### Claim 5 (depends on 3)

The method of claim 3 wherein the exposed portion of the substrate comprises silicon, silicon oxide or silicon nitride.

### Claim 6 (depends on 3)

The method of claim 3 wherein the exposed portion of the substrate consists of elements other than sodium (Na), potassium (K), lithium (Li), rubidium (Rb) and calcium (Ca).

### Claim 7

A method of removing contaminants from a substrate, the method comprising:
placing a substrate into a substrate processing region of a substrate processing chamber, wherein the substrate comprises an exposed portion contaminated with a first contamination concentration greater than 1×1011/cm2 of at least one of an alkali metal or an alkali earth metal;
forming plasma effluents in a remote plasma region by flowing H or O into the remote plasma region while forming a remote plasma, wherein the remote plasma region is fluidly coupled to the substrate processing region;
flowing the plasma effluents into the substrate processing region; and
reducing a contamination concentration from the first contamination concentration to a second contamination concentration less than 1×1010/cm2.

### Claim 8 (depends on 7)

The method of claim 7 wherein the remote plasma region is fluidly coupled to the substrate processing region by a showerhead.

### Claim 9 (depends on 7)

The method of claim 7 wherein flowing H or O comprises flowing a hydrogen-and-oxygen-containing precursor into the remote plasma region.

### Claim 10 (depends on 7)

The method of claim 7 wherein flowing H or O comprises flowing a hydrogen-containing precursor and an oxygen-containing precursor into the remote plasma region.

### Claim 11 (depends on 7)

The method of claim 7 wherein flowing H or O comprises flowing H and O into the remote plasma region.

### Claim 12 (depends on 7)

The method of claim 7 wherein flowing H or O comprises flowing one of H2, H2O, H2O2, NH3, O2, O3, N2O, NO2, or NO into the remote plasma region.

### Claim 13 (depends on 7)

The method of claim 7 wherein the substrate processing region is plasma-free during the flowing the plasma effluents into the substrate processing region.

### Claim 14 (depends on 7)

The method of claim 7 wherein the alkali metal comprises one of sodium (Na), lithium (Li), rubidium (Rb) or potassium (K).

### Claim 15 (depends on 7)

The method of claim 7 wherein the alkali earth metal comprises calcium (Ca).