# US 2018/0024447 A1 · Cleaning Solution Mixing System With Ultra-Dilute Cleaning Solution And Method Of Operation Thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0024447 A1 - Document ID: US20180024447A1 - Status: Published application - Kind: A1 - Application number: 15/652,497 - Filed: 2017-07-18 - Published: 2018-01-25 - Earliest claimed: 2016-07-25 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Abbas Rastegar - Web page: https://patentgrep.com/patent/US20180024447A1 ## CPC - G03F 7/70925: {Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning} - B01F 23/2319: {Methods of introducing gases into liquid media} - B01F 23/405: {Methods of mixing liquids with liquids (B01F23/4105 takes precedence)} - B01F 23/49: {Mixing systems, i.e. flow charts or diagrams} - B01F 23/708: {Filtering materials} - B08B 3/08: the liquid having chemical or dissolving effect - C11D 3/02: Inorganic compounds {; Elemental compounds} - C11D 3/04: Water-soluble compounds - C11D 3/30: Amines; Substituted amines {; Quaternized amines} - C11D 3/3942: {Inorganic per-compounds (C11D3/3902 takes precedence)} - G03F 1/82: Auxiliary processes, e.g. cleaning or inspecting - B08B 3/12: by sonic or ultrasonic vibrations - C11D 2111/44: Multi-step processes - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B01F: MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING (mixing paints B44D3/06) - B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL - C11D: DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL ## Abstract Disclosed are a cleaning solution mixing system, a tool and a method of operation thereof, including an ultrapure water source for providing ultrapure water; an ammonia filter for filtering ammonia in gas form; a hydrogen peroxide filter for filtering hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water; and a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water. ## Claims ### Claim 1 A method of operation of a cleaning solution mixing system comprising: providing ultrapure water from an ultrapure water source; filtering an amount of ammonia through an ammonia filter; filtering an amount of hydrogen peroxide through a hydrogen peroxide filter; forming ultra-dilute ammoniated water by dissolving the ammonia in the ultrapure water; forming ultra-dilute hydrogenated water by dissolving the hydrogen peroxide in the ultrapure water; and forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water. ### Claim 2 (depends on 1) The method as claimed in claim 1 further comprising: filtering an amount of tetramethyl ammonium hydroxide through a tetramethyl ammonium hydroxide filter; and regulating the amount of tetramethyl ammonium hydroxide dissolved in the ultrapure water using a tetramethyl ammonium hydroxide mass flow controller. ### Claim 3 (depends on 1) The method as claimed in claim 1 further comprising filtering the ultra-dilute hydrogenated water through an additional filter. ### Claim 4 (depends on 1) The method as claimed in claim 1 further comprising regulating the amount of the ammonia dissolved in the ultrapure water using an ammonia mass flow controller. ### Claim 5 (depends on 1) The method as claimed in claim 1 further comprising regulating the amount of the hydrogen peroxide dissolved in the ultrapure water using a hydrogen peroxide mass flow controller. ### Claim 6 (depends on 1) The method as claimed in claim 1 further comprising regulating the amount of the ammonia dissolved in the ultrapure water using a conductivity sensor connected to an ammonia mass flow controller. ### Claim 7 (depends on 1) The method as claimed in claim 1 further comprising regulating the amount of the hydrogen peroxide dissolved in the ultrapure water using a hydrogen peroxide sensor connected to a hydrogen peroxide mass flow controller. ### Claim 8 A cleaning solution mixing system comprising: an ultrapure water source for providing ultrapure water; an ammonia filter for filtering an amount of ammonia in gas form; a hydrogen peroxide filter for filtering hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water; and a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water. ### Claim 9 (depends on 8) The system as claimed in claim 8 further comprising a second filter for filtering the ultra-dilute ammoniated water. ### Claim 10 (depends on 8) The system as claimed in claim 8 further comprising a tetramethyl ammonium hydroxide filter for filtering tetramethyl ammonium hydroxide in gas form. ### Claim 11 (depends on 8) The system as claimed in claim 8 further comprising an ammonia mass flow controller for regulating the amount of the ammonia dissolved in the ultrapure water. ### Claim 12 (depends on 8) The system as claimed in claim 8 further comprising a hydrogen peroxide mass flow controller for regulating the amount of the hydrogen peroxide dissolved in the ultrapure water. ### Claim 13 (depends on 8) The system as claimed in claim 8 further comprising a conductivity sensor connected to an ammonia mass flow controller for regulating the amount of the ammonia dissolved in the ultrapure water. ### Claim 14 (depends on 8) The system as claimed in claim 8 further comprising a hydrogen peroxide sensor connected to a hydrogen peroxide mass flow controller for regulating the amount of the hydrogen peroxide dissolved in the ultrapure water. ### Claim 15 A cleaning tool comprising: a cleaning solution mixing system including: an ultrapure water source for providing ultrapure water; an ammonia filter for filtering ammonia in gas form; a hydrogen peroxide filter for filtering hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water; a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water; and a cleaning chamber coupled to the cleaning solution mixing system. ### Claim 16 (depends on 15) The cleaning tool as claimed in claim 15 further comprising: an ammonia gas source for providing the ammonia in gas form; and a hydrogen peroxide gas source for providing the hydrogen peroxide in gas form. ### Claim 17 (depends on 15) The cleaning tool as claimed in claim 15 further comprising a de-gas membrane for removing excess gas from the ultrapure water. ### Claim 18 (depends on 15) The cleaning tool as claimed in claim 15 further comprising a final conductivity sensor between the mixer and the cleaning chamber. ### Claim 19 (depends on 15) The cleaning tool as claimed in claim 15 wherein the ammonia filter has a pore size of less than 5 nm. ### Claim 20 (depends on 15) The cleaning tool as claimed in claim 15 wherein the hydrogen peroxide filter has a pore size of less than 5 nm.