# US 2018/0024441 A1 · Twisted kaleido > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0024441 A1 - Document ID: US20180024441A1 - Status: Published application - Kind: A1 - Application number: 15/656,054 - Filed: 2017-07-21 - Published: 2018-01-25 - Earliest claimed: 2016-07-22 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: David MARKLE; Timothy N. THOMAS - Web page: https://patentgrep.com/patent/US20180024441A1 ## CPC - G03F 7/70191: {Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like} - G02B 6/0005: {the light guides being of the fibre type (G02B6/0003 takes precedence)} - G02B 6/04: formed by bundles of fibres (G02B6/24 takes precedence) - G02B 6/102: {for infrared and ultraviolet radiation} - G03B 21/208: {Homogenising, shaping of the illumination light} - G03F 7/70075: {Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection} - G03B 21/008: {using micromirror devices} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR (optical parts of such apparatus G02B; photosensitive materials or processes for photographic purposes G03C; apparatus for processing exposed photographic materials G03D) ## Abstract Implementations disclosed herein generally relate to a light pipe, or kaleido, for homogenizing light such that the light is uniform once the light exits the light pipe. By reflecting the light inside the light pipe, light uniformity is increased. In one implementation, a light pipe for an image projection apparatus is provided. The light pipe comprises an elongated rectangular body having a refractive index that provides total internal reflection within the elongated rectangular body. The elongated rectangular body has an input face for accepting light into the elongated rectangular body. The input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body. The elongated rectangular body has an output face for releasing light from the elongated rectangular body. The output face is disposed substantially orthogonal to the longitudinal axis. The elongated rectangular body has a twist along the longitudinal axis. ## Claims ### Claim 1 An image projection apparatus for imaging patterns on a substrate, comprising: an illumination system, comprising: a light pipe having an elongated rectangular body that has: an input face for accepting light into the elongated rectangular body, the input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body; an output face for releasing light from the elongated rectangular body, the output face disposed substantially orthogonal to the longitudinal axis, wherein the elongated rectangular body has a twist along the longitudinal axis so that the input face and the output face are twisted relative to each other; a laser light illumination device disposed adjacent to the input face of the light pipe; and a projection system, comprising: at least one projection lens; and a light source coupled with the light pipe. ### Claim 2 (depends on 1) The image projection apparatus of claim 1, wherein the twist is between about 5 degrees and about 15 degrees. ### Claim 3 (depends on 1) The image projection apparatus of claim 1, wherein the twist is induced by mounting the light pipe in the image projection apparatus. ### Claim 4 (depends on 1) The image projection apparatus of claim 1, wherein the light source is a bundle of two or more laser illuminated fibers. ### Claim 5 (depends on 4) The image projection apparatus of claim 4, wherein the light source is coupled with the light pipe through a combiner that packs each of the two or more fibers into a compact bundle. ### Claim 6 (depends on 1) The image projection apparatus of claim 1, wherein the twist is uniform between the input face and the output face. ### Claim 7 (depends on 1) The image projection apparatus of claim 1, wherein the elongated rectangular body is fabricated from glass. ### Claim 8 A system, comprising: two or more stages, wherein the two or more stages are configured to hold one or more substrates; and a plurality of image projection apparatuses for patterning the one or more substrates, wherein each image projection apparatus comprises: an illumination system, comprising: a light pipe having an elongated rectangular body that has: an input face for accepting light into the elongated rectangular body, the input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body; and an output face for releasing light from the elongated rectangular body, the output face disposed substantially orthogonal to the longitudinal axis, wherein the elongated rectangular body has a twist along the longitudinal axis so that the input face and the output face are twisted relative to each other; and a laser light source coupled with the light pipe. ### Claim 9 (depends on 8) The system of claim 8, wherein the twist is between about 5 degrees and about 15 degrees. ### Claim 10 (depends on 9) The system of claim 9, wherein the twist is induced by mounting the light pipe in the image projection apparatus. ### Claim 11 (depends on 8) The system of claim 8, wherein the light source is a bundle of two or more laser illuminated fibers. ### Claim 12 (depends on 8) The system of claim 8, wherein the light source is coupled with the light pipe through a combiner that packs each of the two or more fibers into a compact bundle. ### Claim 13 (depends on 8) The system of claim 8, wherein the twist in the light pipe is uniform between the input face and the output face. ### Claim 14 A method of shaping a beam of illumination, comprising: directing light into a light pipe at an input face of the light pipe, wherein the light pipe has an elongated rectangular body and the input face is disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body; propagating the directed light by total internal reflection through the light pipe to an output face of the light pipe, the output face disposed substantially orthogonal to the longitudinal axis; and allowing the propagated light to emanate from the output face, wherein the elongated rectangular body has a twist along the longitudinal axis. ### Claim 15 (depends on 14) The method of claim 14, wherein the twist is between about 5 degrees and about 15 degrees. ### Claim 16 (depends on 14) The method of claim 14, wherein the twist is between about 10 degrees and about 15 degrees. ### Claim 17 (depends on 14) The method of claim 14, wherein the twist is uniform between the input face and the output face. ### Claim 18 (depends on 14) The method of claim 14, wherein the elongated rectangular body is fabricated from glass. ### Claim 19 (depends on 14) The method of claim 14, wherein the elongated rectangular body is fabricated from fused silica material. ### Claim 20 (depends on 14) The method of claim 14, wherein the input face and the output face are each about 1 to 2 millimeters by about 1 to 2 millimeters with the elongated rectangular body having a length along the longitudinal axis of about 100 to 200 millimeters.