# US 2018/0023765 A1 · Smart package > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0023765 A1 - Document ID: US20180023765A1 - Status: Published application - Kind: A1 - Application number: 15/549,875 - Filed: 2016-02-12 - Published: 2018-01-25 - Earliest claimed: 2015-02-12 - Assignees: Entegris, Inc. - Applicants: Entegris, Inc. - Inventors: Joseph D. SWEENEY; Edward E. JONES; Joseph R. SPRES; Richard S. RAY; Peter C. VAN BUSKIRK; Edward A. STURM; Chris SCANNELL - Web page: https://patentgrep.com/patent/US20180023765A1 ## CPC - F17C 13/026: {having the temperature as the parameter} - F17C 11/00: Use of gas-solvents or gas-sorbents in vessels {(absorbing compositions for acetylene C10L3/04; absorbing compositions for hydrogen C01B3/0005)} - F17C 13/003: {Means for coding or identifying them and/or their contents} - F17C 13/02: Special adaptations of indicating, measuring, or monitoring equipment (measuring in general G01) - G06K 19/06037: {multi-dimensional coding} - G06K 19/0723: {the record carrier comprising an arrangement for non-contact communication, e.g. wireless communication circuits on transponder cards, non-contact smart cards or RFIDs} - F17C 2205/0338: Pressure regulators - F17C 2205/0391: inside the pressure vessel - F17C 2205/05: Vessel or content identifications, e.g. labels - F17C 2205/054: by bar codes - F17C 2205/058: by Radio Frequency Identification - F17C 2250/0439: Temperature - F17C 2270/0518: Semiconductors - F17C: VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES (storing fluids in natural or artificial cavities or chambers in the earth B65G5/00; construction or assembling of bulk storage containers employing civil-engineering techniques E04H7/00; variable-capacity gas-holders F17B; liquefaction or refrigeration machines, plants, or systems F25) - G06K: GRAPHICAL DATA READING (image or video recognition or understanding G06V); PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS ## Abstract A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed. ## Claims ### Claim at position 1 1-52. (canceled) ### Claim 53 A fluid supply package, comprising a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package comprises an informational augmentation device thereon. ### Claim 54 (depends on 1) The fluid supply package of claim 1, wherein the informational augmentation device comprises at least one of a quick read (QR) code and an RFID tag. ### Claim 55 (depends on 1) The fluid supply package of claim 1, wherein the informational augmentation device comprises an RFID tag. ### Claim 56 (depends on 3) The fluid supply package of claim 3, wherein the RFID tag comprises a tag selected from the group consisting of: an active reader passive tag (ARPT); a passive reader active tag (PRAT); and an active reader active tag (ARAT). ### Claim 57 (depends on 3) The fluid supply package of claim 3, wherein the RFID tag comprises a thermally-resistive RFID device that is effective to provide an output indicative of temperature of fluid in the fluid supply package. ### Claim 58 (depends on 1) The fluid supply package of claim 1, wherein the vessel contains a storage medium that is adapted to retain fluid in a stored state under storage conditions, and to release the fluid for discharge from the vessel under dispensing conditions. ### Claim 59 (depends on 1) The fluid supply package of claim 1, wherein the fluid supply package comprises a storage medium wherein the storage medium comprises a physical adsorbent material which comprises an adsorbent selected from the group consisting of carbon adsorbent, zeolite, molecular sieve adsorbent, metal organic framework (MOF), aerogel, alumina, silica, aluminosilicate, porous metal oxide, and combinations of two or more of the foregoing. ### Claim 60 (depends on 1) The fluid supply package of claim 1, wherein the vessel contains at least one interiorly disposed pressure regulator therein configured to dispense fluid from the vessel to the fluid dispensing assembly at pressure determined by a set point of the pressure regulator. ### Claim 61 (depends on 1) The fluid supply package of claim 1, holding a fluid in the fluid storage and dispensing vessel. ### Claim 62 (depends on 1) The fluid supply package of claim 1, wherein the informational augmentation device is readable by a machine reader to initiate accession of a website, display of a webpage, transmission of an email, or other telecommunication action providing information related to the fluid supply package, a fluid packaged therein, or use of the fluid supply package or fluid. ### Claim 63 (depends on 1) The fluid supply package of claim 1, further comprising an interlock structure configured to preclude fluid dispensing from the fluid storage and dispensing vessel unless unlocked by an unlocking signal requiring for its generation information from the informational augmentation device. ### Claim 64 (depends on 11) The fluid supply package of claim 11, wherein the informational augmentation device comprises a quick read (QR) code, and the interlock structure is unlockable by an unlocking signal requiring information from the quick read (QR) code for its generation. ### Claim 65 (depends on 11) The fluid supply package of claim 11, wherein the informational augmentation device comprises an RFID tag, and the interlock structure is unlockable by an unlocking signal requiring information from the RFID tag for its generation. ### Claim 66 A process system comprising at least one fluid supply package comprising a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package comprises an informational augmentation device thereon, and a fluid-utilizing process tool configured to receive fluid from the at least one fluid supply package under the dispensing conditions. ### Claim 67 (depends on 14) The process system of claim 14, wherein the process tool includes at least one communicational device that is communicationally interactive with the informational augmentation device on the fluid supply package for enabling operation of the process tool. ### Claim 68 (depends on 14) The process system of claim 14, wherein the process tool is not operationally competent until communicational interaction of the process tool communicational device with the informational augmentation device on the fluid supply package satisfies a predetermined operational communication protocol. ### Claim 69 (depends on 14) The process system of claim 14, wherein the predetermined operational communication protocol comprises verification of identity of the fluid supply package from fluid supply package information contained in the informational augmentation device on the fluid supply package. ### Claim 70 (depends on 14) The process system of claim 14, wherein the process tool comprises at least one of an ion implantation process tool, a chemical vapor deposition process tool, and etching tool. ### Claim 71 (depends on 14) The process system of claim 14, wherein the at least one fluid supply package comprises a vessel containing physical adsorbent on which fluid is adsorbed at subatmospheric pressure, and the at least one fluid supply package is contained in a gas box that is ventilated with ventilation gas, wherein the process tool includes at least one communicational device that is communicationally interactive with the informational augmentation device on the fluid supply package, wherein the informational augmentation device on the fluid supply package comprises information indicative of subatmospheric pressure in the fluid supply package vessel, and wherein said at least one communicational device is configured to receive the subatmospheric pressure information and to output a control signal for controllably adjusting ventilation gas flow rate through the gas box in response to the subatmospheric pressure of the fluid in the fluid supply package. ### Claim 72 A method of enhancing operation of a process tool receiving fluid from a fluid source for operation of the tool in a process system, said method comprising informationally augmenting the process system by supplying fluid from at least one fluid supply package, wherein the fluid supply package comprises a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, and wherein the fluid supply package comprises an informational augmentation device thereon.