# US 2018/0023719 A1 · Exhaust system and control device

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- Number: US 2018/0023719 A1
- Document ID: US20180023719A1
- Status: Published application
- Kind: A1
- Application number: 15/619,957
- Filed: 2017-06-12
- Published: 2018-01-25
- Earliest claimed: 2016-07-22
- Assignees: Shimadzu Corporation
- Applicants: Shimadzu Corporation
- Inventors: Masaya NAKAMURA; Kiyonori HIROTA; Junichiro KOZAKI; Nobuyuki HIRATA; Atsuo NAKATANI
- Web page: https://patentgrep.com/patent/US20180023719A1

## CPC

- F16K 31/042: {with electric means, e.g. for controlling the motor or a clutch between the valve and the motor}
- F16K 3/0254: {being operated by particular means}
- F16K 3/06: in the form of closure plates arranged between supply and discharge passages (F16K3/10 takes precedence)
- F16K 31/04: using a motor
- F16K 31/041: {for rotating valves (F16K31/055 takes precedence)}
- F16K 37/0041: {for measuring valve parameters (F16K37/0033 takes precedence)}
- F16K 51/02: specially adapted for high-vacuum installations
- F16K 3/16: with special arrangements for separating the sealing faces or for pressing them together (F16K3/10, F16K3/14 take precedence)
- F16K: VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING {(devices for emptying and evacuating the excess liquid in valves or conduits F16L55/07)}

## Abstract

A control device configured to control each of a vacuum pump and a vacuum valve provided on a side of a suction port of the vacuum pump, the control device comprises: a motor driver configured to drive a rotor driving motor of the vacuum pump; a valve plate driver configured to drive a valve plate driving motor of the vacuum valve; and a controller configured to control the motor driver and the valve plate driver.

## Claims

### Claim 1

A control device configured to control each of a vacuum pump and a vacuum valve provided on a side of a suction port of the vacuum pump, the control device comprising:
a motor driver configured to drive a rotor driving motor of the vacuum pump;
a valve plate driver configured to drive a valve plate driving motor of the vacuum valve; and
a controller configured to control the motor driver and the valve plate driver.

### Claim 2 (depends on 1)

The control device according to claim 1, further comprising:
a power section configured to convert AC power to DC power and supply the DC power to each of the motor driver, the valve plate driver, and the controller.

### Claim 3 (depends on 1)

The control device according to claim 1, further comprising:
a communication section configured to carry out communication related to valve operations and communication related to pump operations with an external device via a shared communication interface.

### Claim 4 (depends on 1)

The control device according to claim 1, further comprising:
a single temperature controller configured to control a pump side heater provided on the vacuum pump and a valve side heater provided on the vacuum valve.

### Claim 5 (depends on 1)

An exhaust system comprising:
a vacuum pump;
a vacuum valve mounted on a suction port of the vacuum pump; and
the control device according to claim 1.

### Claim 6 (depends on 5)

The exhaust system according to claim 5, wherein
the control device is provided on a base bottom surface of the vacuum pump, and
the control device is connected to the vacuum valve by connecting a cable to a connector provided on the control device and a connector provided on the vacuum valve.

### Claim 7 (depends on 5)

The exhaust system according to claim 5, wherein
the control device is provided on a side surface of a housing in which the valve plate driving motor is housed, and
the control device is connected to the vacuum pump by connecting a cable to a connector provided on the control device and a connector provided on the vacuum pump.

### Claim 8 (depends on 5)

The exhaust system according to claim 5, wherein
the control device is provided on a base side surface of the vacuum pump, and
the control device is directly connected to the vacuum valve by a connector.