# US 2018/0023624 A1 · Static pressure gas bearing

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- Number: US 2018/0023624 A1
- Document ID: US20180023624A1
- Status: Published application
- Kind: A1
- Application number: 15/714,601
- Filed: 2017-09-25
- Published: 2018-01-25
- Earliest claimed: 2015-03-31
- Assignees: Sumitomo Heavy Industries, Ltd.
- Applicants: Sumitomo Heavy Industries, Ltd.
- Inventors: Tatsuya Yoshida; Kazutoshi Sakaki
- Web page: https://patentgrep.com/patent/US20180023624A1

## CPC

- F16C 32/0614: {the gas being supplied under pressure, e.g. aerostatic bearings}
- F16C 29/005: {Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along}
- F16C 29/025: {Hydrostatic or aerostatic (this type of bearing for rotary parts F16C32/06)}
- F16C 32/06: with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C 32/0666: {of bearing pads}
- F16C 33/74: of sliding-contact bearings
- F16J 15/022: {characterised by structure or material}
- F16J 15/0806: {characterised by material or surface treatment}
- F16J 15/0818: {Flat gaskets}
- F16C 2202/08: Resilience, elasticity, super-elasticity
- F16C 2206/00: Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C 2223/60: by vapour deposition, e.g. PVD, CVD
- F16C 2300/62: low pressure, e.g. elements operating under vacuum conditions
- F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16J: PISTONS {(specially adapted for dampers F16F9/32)}; CYLINDERS; SEALINGS

## Abstract

A static pressure gas bearing used in a vacuum environment includes a guide shaft and a tubular slider which is movable in an axial direction in a state where the guide shaft is accommodated therein. The slider is configured by fastening a plurality of plate-shaped members. A film formed of a soft material having a smaller elastic modulus than that of each of the plate-shaped members is interposed between joint surfaces of the plate-shaped members.

## Claims

### Claim 1

A static pressure gas bearing which is used in a vacuum environment, comprising:
a guide shaft; and
a tubular slider which is movable in an axial direction in a state where the guide shaft is accommodated therein,
wherein the slider is configured by fastening a plurality of plate-shaped members, and
wherein a film formed of a soft material having a smaller elastic modulus than that of each of the plate-shaped members is interposed between joint surfaces of the plate-shaped members.

### Claim 2 (depends on 1)

The static pressure gas bearing according to claim 1,
wherein the plate-shaped member is formed of ceramics and the film is formed by vapor deposition of aluminum.