# US 2018/0023016 A1 · Amorphous hydrocarbon based film, and sliding member and sliding system provided with said film

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- Number: US 2018/0023016 A1
- Document ID: US20180023016A1
- Status: Published application
- Kind: A1
- Application number: 15/547,754
- Filed: 2016-01-29
- Published: 2018-01-25
- Earliest claimed: 2015-01-29
- Assignees: Jtekt Corporation; The University of Tokyo
- Applicants: Jtekt Corporation; The University of Tokyo
- Inventors: Takahisa KATO; Masataka NOSAKA; Mamoru TOHYAMA; Atsushi MURASE; Kyoko NAKAI; Masahiro SUZUKI
- Web page: https://patentgrep.com/patent/US20180023016A1

## CPC

- C10M 105/04: aliphatic
- B05D 5/08: to obtain an anti-friction or anti-adhesive surface (rendering particulate materials free-flowing in general, e.g. making them hydrophobic B01J2/30)
- C10M 103/02: Carbon; Graphite
- C10M 105/06: aromatic
- C10M 105/08: containing oxygen
- C10M 109/02: Reaction products
- C10M 177/00: Special methods of preparation of lubricating compositions; Chemical modification by after-treatment of components or of the whole of a lubricating composition, not covered by other classes
- C23C 16/26: Deposition of carbon only
- C23C 16/44: characterised by the method of coating (C23C16/04 takes precedence)
- C23C 16/50: using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)}
- F16C 17/00: Sliding-contact bearings for exclusively rotary movement (F16C32/06 takes precedence; adjustable bearings F16C23/00, F16C25/00)
- F16C 33/121: {Use of special materials}
- C10M 2201/0413: used as base material
- C10M 2203/0206: used as base material
- C10M 2203/065: used as base material
- C10N 2030/06: Oiliness; Film-strength; Anti-wear; Resistance to extreme pressure
- C10N 2050/02: dissolved or suspended in a carrier which subsequently evaporates to leave a lubricant coating
- C10N 2050/08: Solids
- F16C 2206/02: Carbon based material
- F16C 2206/48: based on zirconia (ZrO2)
- C10M: LUBRICATING COMPOSITIONS (well drilling compositions C09K8/02); USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION (mould release, i.e. separating, agents for metals B22C3/00, for plastics or substances in a plastic state, in general B29C33/56, for glass C03B40/02; textile lubricating compositions D06M11/00, D06M13/00, D06M15/00; immersion oils for microscopy G02B21/33)
- B05D: PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (conveying articles or workpieces through baths of liquid B65G, e.g. B65G49/02)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- C10N: INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS

## Abstract

A low-friction coating includes: an aliphatic hydrocarbon group showing a peak in a region of 2,900 cm−1 to 3000 cm−1 in an infrared absorption spectrum; a carbonyl group showing a peak in a region of 1,650 cm−1 to 1,800 cm−1 in an infrared absorption spectrum; an aromatic component (C7H7+) showing a peak at mass 91.1 in a positive ion spectrum obtained by TOF-SIMS; and a condensed ring based component (C9H7+) showing a peak at mass 115.2 in the positive ion spectrum obtained by TOF-SIMS.

## Claims

### Claim 1

An amorphous hydrocarbon based film comprising:
an aliphatic hydrocarbon group showing a peak in a region of from 2,900 cm−1 to 3,000 cm−1 in an infrared absorption spectrum; and
at least one of an aromatic component showing a peak at a mass of 91.1 in a positive ion spectrum obtained by time-of-flight secondary ion mass spectrometry and a condensed ring based component showing a peak at a mass of 115.2 in the positive ion spectrum obtained by the time-of-flight secondary ion mass spectrometry.

### Claim 2 (depends on 1)

The amorphous hydrocarbon based film according to claim 1, further comprising:
a carbonyl group showing a peak in a region of from 1,650 cm−1 to 1,800 cm−1 in an infrared absorption spectrum.

### Claim 3 (depends on 1)

The amorphous hydrocarbon based film according to claim 1, comprising both the aromatic component and the condensed ring based component.

### Claim 4 (depends on 1)

The amorphous hydrocarbon based film according to claim 1,
wherein an average thickness is 2 nm to 1,000 nm.

### Claim 5 (depends on 1)

A sliding member comprising:
a sliding surface comprising a first coating,
wherein the sliding member is formed of at least one of metal and ceramics, and
wherein the first coating comprises the amorphous hydrocarbon based film according to claim 1.

### Claim 6 (depends on 5)

The sliding member according to claim 5,
wherein the sliding member is formed of ZrO2.

### Claim 7 (depends on 5)

A sliding system comprising:
the sliding member according to claim 5; and
a slid member comprising a slid surface sliding against the sliding surface and comprising a second coating made of an amorphous carbon based film,
wherein the second coating has a Young's modulus of 200 GPa to 250 GPa.

### Claim 8 (depends on 7)

The sliding system according to claim 7,
wherein the second coating comprises a hydroxyl group in an outermost surface thereof, the hydroxyl group showing a peak in a region of from 3,000 cm−1 to 4,000 cm−1 in an infrared absorption spectrum.
