# US 2018/0022928 A1 · Coated article supporting high-entropy nitride and/or oxide thin film inclusive coating, and/or method of making the same

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- Number: US 2018/0022928 A1
- Document ID: US20180022928A1
- Status: Published application
- Kind: A1
- Application number: 15/214,723
- Filed: 2016-07-20
- Published: 2018-01-25
- Earliest claimed: 2016-07-20
- Assignees: Guardian Glass, LLC
- Applicants: Guardian Glass, LLC
- Inventors: Jason BLUSH
- Web page: https://patentgrep.com/patent/US20180022928A1

## CPC

- C09D 5/006: {Anti-reflective coatings}
- C03C 17/225: {Nitrides}
- C03C 17/23: Oxides (C03C17/02 takes precedence)
- C03C 17/36: at least one coating being a metal
- C03C 17/366: {Low-emissivity or solar control coatings}
- C09D 1/00: Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
- C03C 2217/27: Mixtures of metals, alloys
- C03C 2217/281: Nitrides
- C03C 2217/73: Anti-reflective coatings with specific characteristics
- C03C 2217/734: comprising an alternation of high and low refractive indexes
- C03C 2217/78: Coatings specially designed to be durable, e.g. scratch-resistant
- C09D: COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR (cosmetics A61K; processes for applying liquids or other fluent materials to surfaces, in general, B05D; staining wood B27K5/02; glazes or vitreous enamels C03C; natural resins, French polish, drying-oils, driers, turpentine, per se, C09F; polishing compositions other than French polish, ski waxes C09G; adhesives or use of materials as adhesives C09J; materials for sealing or packing joints or covers C09K3/10; materials for stopping leaks C09K3/12; processes for the electrolytic or electrophoretic production of coatings C25D)
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS

## Abstract

Certain example embodiments relate to coated articles supporting high-entropy nitride and/or oxide thing film inclusive coatings, and/or methods of making the same. The example high-entropy alloys systems described herein are heat stable and may be used in optical coatings. A first material system that may be used in connection with certain example embodiments includes SiAlN with one or more (and preferably two or more) of elements such as Hf, Y, Zr, Ti, Ta, and Nb. A second material system that may be used in connection with certain example embodiments includes TiO, with one or more (and preferably two or more) of elements such as Fe, Co, Ni, Sn, Zn, and N. The material systems may in some cases be high-index materials that can serve as a substitute for titanium oxide in layer stacks, in some example applications.

## Claims

### Claim 1

A coated article comprising a substrate and a thin film coating formed thereon, the coating comprising at least one high entropy thin film layer, the high entropy thin film layer including SiAlNx and one or more of: Hafnium, Niobium, Tantalum, Titanium, Yttrium, and Zirconium.

### Claim 2 (depends on 1)

The coated article of claim 1, wherein the high entropy thin film layer comprises SiAlNx and two or more of: Hafnium, Niobium, Tantalum, Titanium, Yttrium, and Zirconium.

### Claim 3 (depends on 1)

The coated article of claim 1, wherein the high entropy thin film layer comprises SiAlNx, as well as Hafnium, Zirconium, and/or Yttrium.

### Claim 4 (depends on 1)

The coated article of claim 1, wherein the high entropy thin film layer has a ΔHmix<−5.5 kJ/mol, ΔHmix>−49 kJ/mol, and an average atomic size difference of >7.

### Claim 5 (depends on 1)

The coated article of claim 1, wherein the high entropy thin film layer has a ΔSmix>7 J/(mol*K), ΔSmix<16 J/(mol*K), and an average atomic size difference of >7.

### Claim 6 (depends on 1)

The coated article of claim 1, wherein the high entropy thin film layer has an average atomic size difference between 7 and 20.

### Claim 7 (depends on 1)

The coated article of claim 1, wherein the thin film coating is heat stable up to a temperature of 650° C. and for a time of up to 15 minutes.

### Claim 8 (depends on 1)

The coated article of claim 1, wherein the substrate with the thin film coating thereon is thermally temperable.

### Claim 9 (depends on 1)

The coated article of claim 1, wherein the thin film coating comprises a plurality of thin film layers, with the high entropy thin film layer being the outermost layer in the thin film coating.

### Claim 10 (depends on 9)

The coated article of claim 9, wherein the thin film coating is an anti-scratch coating.

### Claim 11 (depends on 1)

The coated article of claim 1, wherein the thin film coating is a low-emissivity coating that comprises a plurality of thin film layers, the thin film coating including an infrared reflecting layer sandwiched between first and second high entropy thin film layers.

### Claim 12 (depends on 11)

The coated article of claim 11, wherein the outermost layer of the thin film coating is a third high entropy thin film layer.

### Claim 13 (depends on 11)

The coated article of claim 11, wherein the thin film coating is heat treatable and has a delta E* value of <2.

### Claim 14 (depends on 1)

The coated article of claim 1, wherein the thin film coating is an anti-reflective coating that comprises a plurality of thin film layers.

### Claim 15 (depends on 1)

The coated article of claim 1, further comprising an anti-reflective coating, the high entropy thin film layer being an overcoat for the anti-reflective coating.

### Claim 16 (depends on 1)

The coated article of claim 1, wherein the thin film coating is an anti-reflective coating, the high entropy thin film layer having an index of refraction of 1.8-2.4.

### Claim 17 (depends on 1)

The coated article of claim 1, wherein the high entropy thin film layer has a thickness of 1-500 nm.

### Claim 18 (depends on 1)

The coated article of claim 1, wherein the high entropy thin film layer has a thickness of 10-300 nm.

### Claim 19 (depends on 1)

The coated article of claim 1, wherein the substrate with the thin film coating thereon allows for at least 80% visible transmission.

### Claim 20 (depends on 1)

The coated article of claim 1, wherein the high entropy thin film layer has an index of refraction of 1.8-2.4.

### Claim 21

A method of making a coated article comprising a substrate and a thin film coating formed thereon, the method comprising:
forming the coating, directly or indirectly, on the substrate, the coating comprising at least one high entropy thin film layer, the high entropy thin film layer including SiAlNx and one or more of: Hafnium, Niobium, Tantalum, Titanium, Yttrium, and Zirconium.
