Roll type imprint master mold, method of manufacturing the same, and imprint method using the same

A method of manufacturing an imprint master mold, comprising:

• disposing a base layer on a substrate, the substrate comprising a first area and a second area adjacent to the first area;
• disposing an inorganic insulation layer on the base layer;
• forming a first mask pattern on the inorganic insulation layer in the second area;
• forming a first resin pattern on the inorganic insulation layer in the first area;
• forming a pattern layer in the first area by etching the inorganic insulation layer using the first resin pattern and the first mask pattern as a mask;
• removing the first resin pattern and the first mask pattern;
• forming a second mask pattern on the inorganic insulation layer in the first area;
• forming a second resin pattern on the inorganic insulation layer in the second area;
• forming a pattern layer in the second area by etching the inorganic insulation layer using the second resin pattern and the second mask pattern as a mask;
• removing the second resin pattern and the second mask pattern;
• is separating the base layer from the substrate;
• and
• attaching the base layer on which the pattern layer is formed onto a body of the imprint master mold.

An imprint method, comprising:

• disposing a first layer on a substrate;
• forming an imprint resin layer on the first layer;
• and
• forming an imprint resin pattern from the imprint resin layer using an imprint master mold,
• wherein the imprint master mold comprises:
• a body;
• a base layer disposed on the body to cover a surface of the body;
• and
• a pattern layer disposed on the base layer, the pattern layer comprising an inorganic insulation material.