# US 2018/0020957 A1 · Embedded sacrificial layer to enhance biosensor stability and lifetime for nanopatterned electrodes

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- Number: US 2018/0020957 A1
- Document ID: US20180020957A1
- Status: Published application
- Kind: A1
- Application number: 15/218,550
- Filed: 2016-07-25
- Published: 2018-01-25
- Earliest claimed: 2016-07-25
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Emily R. Kinser
- Web page: https://patentgrep.com/patent/US20180020957A1

## CPC

- A61B 5/1486: using enzyme electrodes, e.g. with immobilised oxidase
- A61B 5/14532: {for measuring glucose, e.g. by tissue impedance measurement}
- A61B 2562/0209: Special features of electrodes classified in A61B5/24, A61B5/25, A61B5/283, A61B5/291, A61B5/296, A61B5/053
- A61B 2562/125: characterised by the manufacture of electrodes
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)

## Abstract

An electrode structure is provided that includes an electrode base having topography located on a surface of the electrode base structure. A biological functionalization layer is located on one or more exposed surfaces of at least the topography of the electrode. A sacrificial layer is located on the biological functionalization layer and is present at least in the physical space located between the individual features of the topography of the electrode.

## Claims

### Claim 1

A structure comprising:
an electrode containing an electrode base having topography located on a surface of an electrode base structure;
a biological functionalization layer located on one or more exposed surfaces of at least said topography of said electrode; and
a sacrificial layer located on said biological functionalization layer and present in the physical space located between said individual features of topography of said electrode.

### Claim 2 (depends on 1)

The structure of claim 1, wherein said topography is non-random.

### Claim 3 (depends on 2)

The structure of claim 2, wherein said electrode base structure and said non-random topography are of uniform construction and uniform composition.

### Claim 4 (depends on 3)

The structure of claim 3, wherein said uniform composition of said electrode base structure and said non-random topography comprise a conductive material.

### Claim 5 (depends on 4)

The structure of claim 4, wherein said conductive material is amorphous.

### Claim 6 (depends on 4)

The structure of claim 4, wherein said conductive material comprises a metallic glass, wherein said metallic glass includes an element selected from the group consisting of platinum, copper, nickel, phosphorous, palladium, zirconium, silver, aluminum, carbon and an alloy of one or more of said elements.

### Claim 7 (depends on 2)

The structure of claim 2, wherein said non-random topography comprises repeating individually articulated features.

### Claim 8 (depends on 7)

The structure of claim 7, wherein each repeating individually articulated feature comprises rods, cones, or annular structures.

### Claim 9 (depends on 1)

The structure of claim 1, wherein said biological functionalization layer is composed of an oligonucleotide, a nucleic acid, a peptide, a ligand, a protein, an enzyme, or any other material apt to bind with a complementary target biomolecule.

### Claim 10 (depends on 9)

The structure of claim 9, wherein said biological functionalization layer is composed of glucose oxidase or glucose dehydrogenase.

### Claim 11 (depends on 1)

The structure of claim 1, wherein said sacrificial layer is composed of a biodegradable material.

### Claim 12 (depends on 11)

The structure of claim 11, wherein said biodegradable material is selected from the group consisting of a polymer, a metal, a ceramic or nanoparticles.

### Claim 13 (depends on 1)

The structure of claim 1, wherein a portion of said biological functionalization material is present on an exposed surface of said electrode base structure.

### Claim 14

A method of forming a structure, said method comprising:
providing an electrode having topography located on a surface of an electrode base structure;
attaching a biological functionalization material to one or more exposed surfaces of at least said topography of said electrode; and
forming a sacrificial layer on said biological functionalization layer and within gaps located between said topography of said electrode.

### Claim 15 (depends on 14)

The method of claim 14, wherein said topography is non-random.

### Claim 16 (depends on 15)

The method of claim 15, wherein said electrode base structure and said non-random topography are of uniform construction and uniform composition.

### Claim 17 (depends on 14)

The method of claim 14, wherein said forming said sacrificial layer comprises:
depositing a biodegradable material; and
performing a recess etch.

### Claim 18 (depends on 15)

The method of claim 15, wherein said non-random topography comprises repeating individually articulated features.

### Claim 19 (depends on 18)

The method of claim 18, wherein each repeating individually articulated feature comprises rods, cones, or annular structures.

### Claim 20 (depends on 14)

The method of claim 14, wherein said sacrificial layer is composed of a biodegradable material.
