Oven controlled mems oscillator
AssigneeMurata Manufacturing Co., Ltd.
InventorVILLE KAAJAKARI
Life of this patent
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Abstract
An oven controlled MEMS timing device that includes a very small oscillator that can be heated very rapidly with very low power. The MEMS device includes a rectangular frame, a heated platform positing in the frame, and a pair of support beams that extend from the rectangular frame and hold the platform within a cavity of the frame to thermally isolate the platform. Moreover, the device includes a resonator attached to the platform by a pair of anchor beams, a heater that heats the platform to maintain a target temperature for the resonator and a thermistor that measures a temperature of the platform to provide a control loop for the heater.
Claims20
An oven controlled MEMS oscillator comprising:
- a frame;
- a platform disposed within the frame;
- at least one support beam extending from the frame and affixed to one end of the platform to hold the platform within a cavity of the frame such that the platform is thermally isolated from the frame;
- a resonator coupled to the platform by at least a pair of anchor beams;
- a temperature sensor disposed on the platform at least between the one end of the platform and the resonator;
- and
- a heater configured to heat the platform and maintain a target temperature in response to a temperature measured by the temperature sensor.
A timing device comprising:
- a carrier;
- oscillation circuitry disposed on the carrier
- an oven lid affixed to the carrier to form a first oven covering the oscillation circuitry;
- a first heater disposed on the carrier and configured to heat the first oven to a first temperature;
- a MEMS oven controlled resonator disposed on the carrier and electrically coupled to the oscillation circuitry, the MEMS oven controlled resonator including:
- a substrate,
- a rectangular frame disposed on the substrate,
- a resonator cap attached to the rectangular frame to form a second oven,
- a platform disposed within the frame,
- at least one support beam configured to hold the platform within a cavity of the frame,
- a resonator coupled to the platform,
- a temperature sensor disposed on the platform at least between the one end of the platform and the resonator, and
- a second heater configured to heat the platform to maintain the second oven at a second temperature higher than the first temperature in response to a temperature measured by the temperature sensor.
Dependencies are inferred from the claim text.