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US 2018/0019728 A1Published application
Piezoelectric mems resonator with a high quality factor
AssigneeMurata Manufacturing Co., Ltd.
InventorVILLE KAAJAKARI
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Abstract
A MEMS resonator is provided with a high quality factor and lower motional impedance. The MEMS resonator includes a silicon layer having opposing surfaces, a piezoelectric layer above one of the surfaces of the silicon layer, and a pair of electrodes disposed on opposing surfaces of the piezoelectric layer, respectively. Moreover, the piezoelectric layer has a crystallographic axis that extends at an angle relative to the vertical axis of the MEMS resonator.
Claims20
A MEMS resonator comprising:
- a silicon layer having a first surface and a second surface opposite the first surface;
- a piezoelectric layer disposed above the first surface of the silicon layer and having a crystallographic axis extending in a direction at an angle equal to or greater than 5° relative to a direction orthogonal to the first surface of the silicon layer;
- and
- a pair of electrodes disposed on opposing surfaces of the piezoelectric layer, respectively,
- wherein the crystallographic axis is an average of axes of individual crystals of the piezoelectric layer.
2 more elements
A MEMS resonator array comprising:
- a plurality of MEMS resonators, each having:
- a silicon layer having a first surface and a second surface opposite the first surface;
- a piezoelectric layer disposed above the first surface of the silicon layer and having a crystallographic axis extending in a direction at an angle equal to or greater than 5° relative to a direction orthogonal to the first surface of the silicon layer;
- and
- a pair of electrodes disposed on opposing surfaces of the piezoelectric layer, respectively,
- wherein each of the plurality of MEMS resonators is arranged laterally with respect to each other as an array, and
- wherein the crystallographic axis is an average of axes of individual crystals of the piezoelectric layer.
4 more elements
Dependencies are inferred from the claim text.