Manufacturing Apparatus And Method For Making Silicon Nanowires On Carbon Based Powders For Use In Batteries
AssigneeOneD Material, Inc.
InventorsYimin Zhu, Vincent Pluvinage
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Abstract
Manufacturing apparatus, systems and method of making silicon (Si) nanowires on carbon based powders, such as graphite, that may be used as anodes in lithium ion batteries are provided. In some embodiments, an inventive tumbler reactor and chemical vapor deposition (CVD) system and method for growing silicon nanowires on carbon based powders in scaled up quantities to provide production scale anodes for the battery industry are described.
Claims29
A manufacturing apparatus for growing silicon nanowires on carbon based powders, comprising:
- a CVD chamber;
- a process tube positioned within the CVD chamber;
- and
- a tumbler reactor configured to receive the carbon based powder, the tumbler reactor removably positioned within the process tube, the tumbler reactor having a gas distribution manifold positioned therein, and the tumbler reactor configured to rotate within the process tube.
A manufacturing apparatus for growing silicon nanowires on carbon based powders, comprising:
- a CVD chamber;
- and
- an elongated process tube positioned within the CVD chamber, the process tube comprising:
- at least one heating zone, at least one reaction zone and at least one cooling zone;
- a gas manifold for injecting gases into the process tube;
- a gas injector, coupled to the gas manifold, and extending through at least a portion of the process tube, the gas injector containing a plurality of injection ports in a section of the gas injector to inject process gases into the at least one reaction zone;
- and
- an elongated auger extending through the substantial length of the process tube and configured to push the carbon based powders through the at least one preheating, reaction and cooling zones.
Dependencies are inferred from the claim text.